DE3686548D1 - Verfahren zur herstellung von scheiben. - Google Patents
Verfahren zur herstellung von scheiben.Info
- Publication number
- DE3686548D1 DE3686548D1 DE8686114697T DE3686548T DE3686548D1 DE 3686548 D1 DE3686548 D1 DE 3686548D1 DE 8686114697 T DE8686114697 T DE 8686114697T DE 3686548 T DE3686548 T DE 3686548T DE 3686548 D1 DE3686548 D1 DE 3686548D1
- Authority
- DE
- Germany
- Prior art keywords
- producing discs
- discs
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Revoked
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/003—Multipurpose machines; Equipment therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
- B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/18—Epitaxial-layer growth characterised by the substrate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/959—Mechanical polishing of wafer
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60236899A JPS6296400A (ja) | 1985-10-23 | 1985-10-23 | ウエハの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3686548D1 true DE3686548D1 (de) | 1992-10-01 |
DE3686548T2 DE3686548T2 (de) | 1993-03-11 |
Family
ID=17007406
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8686114697T Revoked DE3686548T2 (de) | 1985-10-23 | 1986-10-23 | Verfahren zur herstellung von scheiben. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4756796A (de) |
EP (1) | EP0221454B1 (de) |
JP (1) | JPS6296400A (de) |
CN (1) | CN86107119A (de) |
DE (1) | DE3686548T2 (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1229640B (it) * | 1987-06-29 | 1991-09-04 | S G S Microelettronica S P A O | Processo di conformazione del bordo di fette di materiale semiconduttore e relativa apparecchiatura |
EP0534499A3 (en) * | 1987-10-29 | 1993-04-21 | Tokyo Seimitsu Co.,Ltd. | Method for slicing a wafer |
DE3737540C1 (de) * | 1987-11-05 | 1989-06-22 | Mueller Georg Nuernberg | Verfahren und Maschine zum Herstellen von Ronden mit zumindest einer planen Oberflaeche |
JPH0767692B2 (ja) * | 1989-09-07 | 1995-07-26 | 株式会社東京精密 | スライシングマシンの切断方法 |
US5189843A (en) * | 1990-08-30 | 1993-03-02 | Silicon Technology Corporation | Wafer slicing and grinding machine and a method of slicing and grinding wafers |
DE4134110A1 (de) * | 1991-10-15 | 1993-04-22 | Wacker Chemitronic | Verfahren zum rotationssaegen sproedharter werkstoffe, insbesondere solcher mit durchmessern ueber 200 mm in duenne scheiben vermittels innenlochsaege und vorrichtung zur durchfuehrung des verfahrens |
JPH05259016A (ja) * | 1992-03-12 | 1993-10-08 | Mitsubishi Electric Corp | ウエハ作製用基板及び半導体ウエハの製造方法 |
JP2903916B2 (ja) * | 1992-11-30 | 1999-06-14 | 信越半導体株式会社 | 半導体インゴット加工方法 |
WO2001046489A1 (en) * | 1999-12-21 | 2001-06-28 | Trustees Of Boston University | Ion beam modification of residual stress gradients in thin film polycrystalline silicon membranes |
JP2002231665A (ja) * | 2001-02-06 | 2002-08-16 | Sumitomo Metal Ind Ltd | エピタキシャル膜付き半導体ウエーハの製造方法 |
JP4232605B2 (ja) * | 2003-10-30 | 2009-03-04 | 住友電気工業株式会社 | 窒化物半導体基板の製造方法と窒化物半導体基板 |
US7708251B2 (en) * | 2006-03-17 | 2010-05-04 | Nautilus, Inc. | Mechanism and method for adjusting seat height for exercise equipment |
KR101715024B1 (ko) | 2006-12-28 | 2017-03-10 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 사파이어 기판 |
RU2412037C1 (ru) | 2006-12-28 | 2011-02-20 | Сэнт-Гобэн Керамикс Энд Пластикс, Инк. | Партия сапфировых подложек и способ ее изготовления |
EP2865790A1 (de) | 2006-12-28 | 2015-04-29 | Saint-Gobain Ceramics & Plastics Inc. | Saphir-Substrate |
US8740670B2 (en) | 2006-12-28 | 2014-06-03 | Saint-Gobain Ceramics & Plastics, Inc. | Sapphire substrates and methods of making same |
US20100037933A1 (en) | 2008-08-12 | 2010-02-18 | Harold John Hovel | Solar cell panels and method of fabricating same |
CN102808213A (zh) * | 2012-08-21 | 2012-12-05 | 安阳市凤凰光伏科技有限公司 | 铸造法生产类似单晶大面积晶种制备方法 |
CN110453288A (zh) * | 2018-05-08 | 2019-11-15 | 安徽科瑞思创晶体材料有限责任公司 | 一种消除晶体切割应力的化学腐蚀工艺 |
CN110227973B (zh) * | 2019-07-09 | 2021-04-23 | 泰州左岸信息科技有限公司 | 一种性能稳定的玻璃打孔设备 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2382257A (en) * | 1943-04-21 | 1945-08-14 | Albert Ramsay | Manufacture of piezoelectric oscillator blanks |
US2886026A (en) * | 1957-08-20 | 1959-05-12 | Texas Instruments Inc | Method of and apparatus for cutting a semiconductor crystal |
US4084354A (en) * | 1977-06-03 | 1978-04-18 | International Business Machines Corporation | Process for slicing boules of single crystal material |
JPS54110783A (en) * | 1978-02-20 | 1979-08-30 | Hitachi Ltd | Semiconductor substrate and its manufacture |
US4228578A (en) * | 1979-01-15 | 1980-10-21 | Monsanto Company | Method for off-orientation point rotation sawing of crystalline rod material |
US4261781A (en) * | 1979-01-31 | 1981-04-14 | International Business Machines Corporation | Process for forming compound semiconductor bodies |
JPS58173609A (ja) * | 1982-04-05 | 1983-10-12 | 株式会社東芝 | 薄片切断装置 |
JPS58179609A (ja) * | 1982-04-14 | 1983-10-20 | 株式会社東芝 | 薄片切断装置 |
US4465550A (en) * | 1982-06-16 | 1984-08-14 | General Signal Corporation | Method and apparatus for slicing semiconductor ingots |
US4554717A (en) * | 1983-12-08 | 1985-11-26 | The United States Of America As Represented By The Secretary Of The Army | Method of making miniature high frequency SC-cut quartz crystal resonators |
JPS61106207A (ja) * | 1984-10-31 | 1986-05-24 | 株式会社東京精密 | ウエハー製造方法並びに装置 |
JPS61114813A (ja) * | 1984-11-09 | 1986-06-02 | 日立精工株式会社 | 切断方法 |
-
1985
- 1985-10-23 JP JP60236899A patent/JPS6296400A/ja active Granted
-
1986
- 1986-10-10 US US06/917,726 patent/US4756796A/en not_active Expired - Lifetime
- 1986-10-21 CN CN86107119A patent/CN86107119A/zh active Pending
- 1986-10-23 DE DE8686114697T patent/DE3686548T2/de not_active Revoked
- 1986-10-23 EP EP86114697A patent/EP0221454B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CN86107119A (zh) | 1987-04-29 |
DE3686548T2 (de) | 1993-03-11 |
EP0221454A1 (de) | 1987-05-13 |
US4756796A (en) | 1988-07-12 |
EP0221454B1 (de) | 1992-08-26 |
JPS6296400A (ja) | 1987-05-02 |
JPH0429640B2 (de) | 1992-05-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent | ||
8331 | Complete revocation |