JPH0428431B2 - - Google Patents

Info

Publication number
JPH0428431B2
JPH0428431B2 JP59123275A JP12327584A JPH0428431B2 JP H0428431 B2 JPH0428431 B2 JP H0428431B2 JP 59123275 A JP59123275 A JP 59123275A JP 12327584 A JP12327584 A JP 12327584A JP H0428431 B2 JPH0428431 B2 JP H0428431B2
Authority
JP
Japan
Prior art keywords
valve
system pipe
substrate
exhaust system
waste liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59123275A
Other languages
English (en)
Japanese (ja)
Other versions
JPS614576A (ja
Inventor
Kyofumi Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Priority to JP12327584A priority Critical patent/JPS614576A/ja
Publication of JPS614576A publication Critical patent/JPS614576A/ja
Publication of JPH0428431B2 publication Critical patent/JPH0428431B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Weting (AREA)
JP12327584A 1984-06-15 1984-06-15 スプレ−方法 Granted JPS614576A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12327584A JPS614576A (ja) 1984-06-15 1984-06-15 スプレ−方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12327584A JPS614576A (ja) 1984-06-15 1984-06-15 スプレ−方法

Publications (2)

Publication Number Publication Date
JPS614576A JPS614576A (ja) 1986-01-10
JPH0428431B2 true JPH0428431B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-05-14

Family

ID=14856531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12327584A Granted JPS614576A (ja) 1984-06-15 1984-06-15 スプレ−方法

Country Status (1)

Country Link
JP (1) JPS614576A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61160933A (ja) * 1985-01-08 1986-07-21 Nec Corp 現像処理装置
JPS6314434A (ja) * 1986-07-04 1988-01-21 Dainippon Screen Mfg Co Ltd 基板表面処理方法および装置
JPH0719764B2 (ja) * 1986-07-28 1995-03-06 大日本スクリ−ン製造株式会社 表面洗浄方法
JPH0611023B2 (ja) * 1986-12-29 1994-02-09 東京エレクトロン株式会社 現像方法
JP2901364B2 (ja) * 1991-03-18 1999-06-07 山形日本電気株式会社 半導体装置の製造装置
JPH0817815A (ja) * 1994-06-30 1996-01-19 Toshiba Corp 半導体デバイスの製造方法、半導体基板の処理方法、分析方法及び製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56146467U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1980-03-28 1981-11-05

Also Published As

Publication number Publication date
JPS614576A (ja) 1986-01-10

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees