JPH0423508B2 - - Google Patents

Info

Publication number
JPH0423508B2
JPH0423508B2 JP59135987A JP13598784A JPH0423508B2 JP H0423508 B2 JPH0423508 B2 JP H0423508B2 JP 59135987 A JP59135987 A JP 59135987A JP 13598784 A JP13598784 A JP 13598784A JP H0423508 B2 JPH0423508 B2 JP H0423508B2
Authority
JP
Japan
Prior art keywords
magnetic
vehicle
guide rail
carrier
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59135987A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6115557A (ja
Inventor
Teruo Azusawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP59135987A priority Critical patent/JPS6115557A/ja
Priority to DE8585105026T priority patent/DE3585708D1/de
Priority to US06/726,982 priority patent/US4690066A/en
Priority to EP85105026A priority patent/EP0169983B1/en
Publication of JPS6115557A publication Critical patent/JPS6115557A/ja
Publication of JPH0423508B2 publication Critical patent/JPH0423508B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60L—PROPULSION OF ELECTRICALLY-PROPELLED VEHICLES; SUPPLYING ELECTRIC POWER FOR AUXILIARY EQUIPMENT OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRODYNAMIC BRAKE SYSTEMS FOR VEHICLES IN GENERAL; MAGNETIC SUSPENSION OR LEVITATION FOR VEHICLES; MONITORING OPERATING VARIABLES OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRIC SAFETY DEVICES FOR ELECTRICALLY-PROPELLED VEHICLES
    • B60L13/00—Electric propulsion for monorail vehicles, suspension vehicles or rack railways; Magnetic suspension or levitation for vehicles
    • B60L13/04—Magnetic suspension or levitation for vehicles
    • B60L13/06—Means to sense or control vehicle position or attitude with respect to railway
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/10—Arrangements for locking the bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0472—Active magnetic bearings for linear movement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/025—Asynchronous motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60L—PROPULSION OF ELECTRICALLY-PROPELLED VEHICLES; SUPPLYING ELECTRIC POWER FOR AUXILIARY EQUIPMENT OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRODYNAMIC BRAKE SYSTEMS FOR VEHICLES IN GENERAL; MAGNETIC SUSPENSION OR LEVITATION FOR VEHICLES; MONITORING OPERATING VARIABLES OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRIC SAFETY DEVICES FOR ELECTRICALLY-PROPELLED VEHICLES
    • B60L2200/00—Type of vehicles
    • B60L2200/26—Rail vehicles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2326/00—Articles relating to transporting
    • F16C2326/10—Railway vehicles

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Transportation (AREA)
  • Non-Mechanical Conveyors (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Linear Motors (AREA)
JP59135987A 1984-06-30 1984-06-30 浮上式搬送装置 Granted JPS6115557A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP59135987A JPS6115557A (ja) 1984-06-30 1984-06-30 浮上式搬送装置
DE8585105026T DE3585708D1 (de) 1984-06-30 1985-04-25 Foerdersystem vom typ mit schwebendem traeger.
US06/726,982 US4690066A (en) 1984-06-30 1985-04-25 Electromagnetically floated carrier system with stopping unit
EP85105026A EP0169983B1 (en) 1984-06-30 1985-04-25 Transporting system of floated carrier type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59135987A JPS6115557A (ja) 1984-06-30 1984-06-30 浮上式搬送装置

Publications (2)

Publication Number Publication Date
JPS6115557A JPS6115557A (ja) 1986-01-23
JPH0423508B2 true JPH0423508B2 (en, 2012) 1992-04-22

Family

ID=15164542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59135987A Granted JPS6115557A (ja) 1984-06-30 1984-06-30 浮上式搬送装置

Country Status (4)

Country Link
US (1) US4690066A (en, 2012)
EP (1) EP0169983B1 (en, 2012)
JP (1) JPS6115557A (en, 2012)
DE (1) DE3585708D1 (en, 2012)

Families Citing this family (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2553043B2 (ja) * 1986-05-14 1996-11-13 株式会社東芝 浮上式搬送装置
US4793263A (en) * 1986-08-01 1988-12-27 The Boeing Company Integrated linear synchronous unipolar motor with controlled permanent magnet bias
US4894909A (en) * 1987-10-28 1990-01-23 Mazda Motor Corp. Apparatus for assembling wheel attaching unit for use in vehicle assembly line
US5170714A (en) * 1988-06-13 1992-12-15 Asahi Glass Company, Ltd. Vacuum processing apparatus and transportation system thereof
EP0346815A3 (en) * 1988-06-13 1990-12-19 Asahi Glass Company Ltd. Vacuum processing apparatus and transportation system thereof
US5105110A (en) * 1989-11-08 1992-04-14 Utdc Inc. Linear induction motor secondary
US5118055A (en) * 1990-07-05 1992-06-02 Utdc, Inc. Reduced voltage braking system in a linear motor in-track transit system
US5127599A (en) * 1990-07-05 1992-07-07 Utdc, Inc. Deceleration zone in a linear motor in-track transit system
US5116002A (en) * 1990-07-05 1992-05-26 Utdc, Inc. Stopping zones in a linear motor in-track transit system
IT1254106B (it) * 1991-11-13 1995-09-07 Prosit Di Poletto Luigi E C Impianto per la distribuzione di prodotti da una unita' centrale a piu' unita' periferiche
JP3010129B2 (ja) * 1995-02-06 2000-02-14 財団法人鉄道総合技術研究所 上下非対称８字型コイル
JP2000191140A (ja) * 1998-12-26 2000-07-11 Minebea Co Ltd リニアモ―タを用いた搬送システム
CA2400030A1 (en) * 2000-02-15 2001-08-23 Edward M. Pribonic Eddy current braking apparatus
US6533083B1 (en) * 2000-02-15 2003-03-18 Magnetar Technologies, Inc Eddy current braking apparatus
EP1281194A1 (de) * 2000-05-09 2003-02-05 Siemens Production and Logistics Systems AG Längsförderer
JP4831719B2 (ja) * 2001-08-06 2011-12-07 学校法人日本大学 磁気浮上式ｘｙ面リニア同期モータ
KR20070101232A (ko) * 2004-09-10 2007-10-16 오씨 외를리콘 발처스 악티엔게젤샤프트 기판 공정 시스템
EP1915273A2 (en) * 2005-06-30 2008-04-30 Magnetar Technologies Corporation Axial rotary eddy current brake with adjustable braking force
US8358423B2 (en) * 2008-04-10 2013-01-22 Draka Industrial Cable Gmbh Contactless measurement of an offset of the functional components of a travel path of a magnetic levitation railway
KR100984488B1 (ko) * 2008-06-04 2010-10-01 한국과학기술연구원 리니어 모터
TWI591006B (zh) 2009-03-03 2017-07-11 Ａｔｓ自動模具系統股份有限公司 多模式及多間距輸送機系統
NZ575464A (en) 2009-03-10 2010-07-30 Holmes Solutions Ltd Improvements in and relating to braking mechanisms
CN102175168B (zh) * 2011-01-20 2012-10-03 中国人民解放军国防科学技术大学 中低速磁悬浮f型轨的轨道动态检测设备
US8794426B2 (en) 2011-03-31 2014-08-05 Ats Automation Tooling Systems Inc. Pallet-based position adjustment system and method
DE102011113000A1 (de) * 2011-09-09 2013-03-14 Weiss Gmbh Transportvorrichtung
JP6261967B2 (ja) * 2013-12-03 2018-01-17 株式会社ディスコ 加工装置
NZ619034A (en) 2013-12-16 2015-03-27 Eddy Current Ltd Partnership An assembly to control relative speed of movement between parts
DE102014003882B4 (de) * 2014-03-19 2017-07-13 Applied Materials, Inc. (N.D.Ges.D. Staates Delaware) Transportvorrichtung zum Bewegen und/oder Positionieren von Objekten
RU2569812C1 (ru) * 2014-07-23 2015-11-27 федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Южно-Российский государственный политехнический университет (НПИ) имени М.И. Платова" Способ автоматического контроля перемещения складских грузовых платформ и устройство для его осуществления
JP6668331B2 (ja) 2014-08-18 2020-03-18 エディ・カーレント・リミテッド・パートナーシップ 部材間の運動学的関係の調整
SG11201701192UA (en) 2014-08-18 2017-03-30 Eddy Current Ltd Partnership Tuning of a kinematic relationship between members
US10020720B2 (en) 2014-08-18 2018-07-10 Eddy Current Limited Partnership Latching devices
WO2016029059A2 (en) 2014-08-20 2016-02-25 Mcgowan John Lewis Eddy current braking device for linear systems
MX365838B (es) 2014-12-04 2019-06-17 Eddy Current Lp Transmisiones que incorporan frenado de corriente parasita.
EP3227990B1 (en) 2014-12-04 2023-10-11 Eddy Current Limited Partnership Eddy current brake configurations
EP3912685A1 (en) 2014-12-04 2021-11-24 Eddy Current Limited Partnership Methods of altering eddy current interactions
EP3226978B1 (en) 2014-12-04 2025-02-12 SureWerx USA, Inc. Latch activation between elements
CN112972922B (zh) 2014-12-04 2023-02-28 涡流有限合伙公司 能量吸收装置
EP3029723B1 (en) 2014-12-05 2020-09-16 Robert Bosch GmbH Transport device and transport method for transporting a fragile object
CN105346970B (zh) * 2015-12-10 2017-11-24 重庆凯西驿电子科技有限公司 转动式三极管运输装置
JP7044444B2 (ja) 2015-12-18 2022-03-30 エディ・カーレント・リミテッド・パートナーシップ 動力システムのための可変挙動制御機構
KR102155758B1 (ko) 2017-08-24 2020-09-14 어플라이드 머티어리얼스, 인코포레이티드 진공 프로세싱 시스템에서 디바이스를 비접촉식으로 운송하기 위한 장치 및 방법
JP2019046836A (ja) * 2017-08-30 2019-03-22 パナソニックＩｐマネジメント株式会社 生産システムおよび生産方法ならびに生産ライン管理装置
CN108650879B (zh) * 2018-08-21 2020-05-01 安徽广晟德自动化设备有限公司 一种适用于贴片机的视觉识别装置和方法
WO2020126040A1 (en) * 2018-12-21 2020-06-25 Applied Materials, Inc. Magnetic levitation system, carrier for a magnetic levitation system, vacuum system, and method of transporting a carrier
US12119173B2 (en) 2019-04-29 2024-10-15 Applied Materials, Inc. Magnetic levitation system, base and carrier of a magnetic levitation system, and method of levitating a carrier
CN113767464B (zh) * 2019-06-17 2025-05-27 应用材料公司 磁悬浮系统和悬浮载体的方法
WO2021055748A2 (en) 2019-09-20 2021-03-25 TruBlue LLC Lock-off descent control systems and devices

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3233559A (en) * 1964-10-27 1966-02-08 Lor Corp Transportation means
FR2102628A5 (en, 2012) * 1970-08-12 1972-04-07 Compteurs Comp D
DE2157011A1 (de) * 1971-11-17 1973-05-24 Krauss Maffei Ag Abstandsmessanordnung fuer elektromagnetische trag- oder fuehrungssysteme fuer schwebefahrzeuge
DE2202027C3 (de) * 1972-01-17 1979-01-11 Krauss-Maffei Ag, 8000 Muenchen Fahrbahnschiene für ein magnetisch frei schwebendes Fahrzeug
US3785475A (en) * 1972-03-09 1974-01-15 Magna Matic Systems Inc Magnetically controlled non-synchronous conveyor system
GB1373054A (en) * 1972-05-25 1974-11-06 Tracked Hovercraft Ltd Electromagnetic levitation
JPS5345564B2 (en, 2012) * 1972-06-15 1978-12-07
US3937148A (en) * 1973-01-02 1976-02-10 Cambridge Thermionic Corporation Virtually zero power linear magnetic bearing
US3899979A (en) * 1973-02-22 1975-08-19 Buryan Associates Magnetic suspension systems for vehicles
GB1457262A (en) * 1973-04-10 1976-12-01 Brentford Electric Ltd Magnetic positional control systems
JPS5041007A (en, 2012) * 1973-08-15 1975-04-15
CA1044774A (en) * 1974-07-26 1978-12-19 Gotz Heidelberg Magnetic system for supporting and propelling a vehicle along a roadway
JPS5135610U (en, 2012) * 1974-09-09 1976-03-17
JPS5277314A (en) * 1975-12-23 1977-06-29 Japanese National Railways<Jnr> Guide system for linear motor car
JPS5810921B2 (ja) * 1977-02-26 1983-02-28 日本航空株式会社 浮上式走行体の電磁浮上案内制御装置
JPS5613325A (en) * 1979-07-04 1981-02-09 Nordson Kk Method of sealing up container
JPS5854871Y2 (ja) * 1979-11-30 1983-12-14 富士通株式会社 リニアモ−タの停止位置決め機構
JPS573588A (en) * 1980-06-06 1982-01-09 Fujitsu Ltd Stopping-positioning apparatus for linear induction motor
JPS5744560A (en) * 1980-08-28 1982-03-13 Akebono Brake Ind Sliding track for suction type floating car
US4395165A (en) * 1980-12-19 1983-07-26 International Business Machine Corp. Chip shuttle track
JPS5931216A (ja) * 1982-08-11 1984-02-20 Hitachi Kiden Kogyo Ltd リニアモ−タ用リアクシヨンプレ−トと搬送装置

Also Published As

Publication number Publication date
EP0169983B1 (en) 1992-03-25
EP0169983A2 (en) 1986-02-05
EP0169983A3 (en) 1988-08-17
DE3585708D1 (de) 1992-04-30
JPS6115557A (ja) 1986-01-23
US4690066A (en) 1987-09-01

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term