JPH0419886B2 - - Google Patents

Info

Publication number
JPH0419886B2
JPH0419886B2 JP58230587A JP23058783A JPH0419886B2 JP H0419886 B2 JPH0419886 B2 JP H0419886B2 JP 58230587 A JP58230587 A JP 58230587A JP 23058783 A JP23058783 A JP 23058783A JP H0419886 B2 JPH0419886 B2 JP H0419886B2
Authority
JP
Japan
Prior art keywords
gas
silane
exhaust gas
packed bed
concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58230587A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60125233A (ja
Inventor
Jun Saito
Takatoshi Mitsuishi
Hiroshi Waki
Hiroji Myagawa
Hiroshige Amita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP58230587A priority Critical patent/JPS60125233A/ja
Publication of JPS60125233A publication Critical patent/JPS60125233A/ja
Publication of JPH0419886B2 publication Critical patent/JPH0419886B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
  • Treating Waste Gases (AREA)
JP58230587A 1983-12-08 1983-12-08 排ガスの高度処理方法 Granted JPS60125233A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58230587A JPS60125233A (ja) 1983-12-08 1983-12-08 排ガスの高度処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58230587A JPS60125233A (ja) 1983-12-08 1983-12-08 排ガスの高度処理方法

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP5018647A Division JPH0783820B2 (ja) 1993-02-05 1993-02-05 排ガスの高度処理方法
JP5018646A Division JPH0724738B2 (ja) 1993-02-05 1993-02-05 排ガスの高度処理剤

Publications (2)

Publication Number Publication Date
JPS60125233A JPS60125233A (ja) 1985-07-04
JPH0419886B2 true JPH0419886B2 (cs) 1992-03-31

Family

ID=16910075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58230587A Granted JPS60125233A (ja) 1983-12-08 1983-12-08 排ガスの高度処理方法

Country Status (1)

Country Link
JP (1) JPS60125233A (cs)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6190726A (ja) * 1984-10-12 1986-05-08 Nippon Paionikusu Kk 除去剤
JPS61129026A (ja) * 1984-11-27 1986-06-17 Nippon Paionikusu Kk 排ガスの浄化方法
JPS621439A (ja) * 1985-06-25 1987-01-07 Nippon Paionikusu Kk 有害成分の除去方法
JPH0687943B2 (ja) * 1986-06-03 1994-11-09 日本パイオニクス株式会社 排ガスの浄化方法
JPH0741145B2 (ja) * 1986-11-28 1995-05-10 旭硝子株式会社 エッチング排ガス除害方法
JP2736662B2 (ja) * 1988-11-04 1998-04-02 東芝セラミックス株式会社 半導体ウェーハの曇防止装置
JP2539067B2 (ja) * 1990-02-20 1996-10-02 富士通株式会社 減圧気相成長装置
JPH09239232A (ja) * 1994-08-05 1997-09-16 Tadahiro Omi 水素化物ガスの除去方法及び除去装置
JP2608394B2 (ja) * 1995-09-21 1997-05-07 日本パイオニクス株式会社 除去剤
GB9913970D0 (en) * 1999-06-16 1999-08-18 Boc Group Plc Semiconductor processing exhaust abatement
JP4909614B2 (ja) * 2006-03-28 2012-04-04 大陽日酸株式会社 水素化物ガス中の微量不純物分析方法及び装置
CN112000059B (zh) * 2020-08-12 2022-03-15 国能龙源环保有限公司 一种氨在线分析仪自动控制系统及控制方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3789581A (en) * 1972-04-27 1974-02-05 Gulf Research Development Co Process for initial removal of sulfur compounds from gaseous hydrocarbon feedstocks before removal of arsenic therefrom
JPS6017772B2 (ja) * 1980-10-31 1985-05-07 大阪石油化学株式会社 炭化水素中の砒素の除去方法
JPS58122025A (ja) * 1982-01-13 1983-07-20 Showa Denko Kk ドライエツチング排ガスの処理方法
JPS58128146A (ja) * 1982-01-27 1983-07-30 Nippon Sanso Kk 吸収処理剤
JPS5949822A (ja) * 1982-09-14 1984-03-22 Nippon Sanso Kk 揮発性無機水素化物等を含有するガスの処理方法

Also Published As

Publication number Publication date
JPS60125233A (ja) 1985-07-04

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