KR890004761A - 수소 정제 방법 - Google Patents
수소 정제 방법 Download PDFInfo
- Publication number
- KR890004761A KR890004761A KR1019880011398A KR880011398A KR890004761A KR 890004761 A KR890004761 A KR 890004761A KR 1019880011398 A KR1019880011398 A KR 1019880011398A KR 880011398 A KR880011398 A KR 880011398A KR 890004761 A KR890004761 A KR 890004761A
- Authority
- KR
- South Korea
- Prior art keywords
- hydrogen
- boron
- phosphorus
- activated carbon
- aforementioned
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
- C01B3/56—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by contacting with solids; Regeneration of used solids
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/30—Active carbon
- C01B32/354—After-treatment
- C01B32/36—Reactivation or regeneration
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/029—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of monosilane
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
- C01B2203/042—Purification by adsorption on solids
- C01B2203/043—Regenerative adsorption process in two or more beds, one for adsorption, the other for regeneration
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
- C01B2203/0465—Composition of the impurity
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
- C01B2203/0465—Composition of the impurity
- C01B2203/048—Composition of the impurity the impurity being an organic compound
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Silicon Compounds (AREA)
- Hydrogen, Water And Hydrids (AREA)
- Treating Waste Gases (AREA)
- Separation Of Gases By Adsorption (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
Claims (10)
- 붕소-및/또는 인-함유 오염 물질을 함유하는 수소 기류에서 전술한 오염 물질의 양을 감소시키는 방법에 있어서 전술한 기류를 극저온에서 활성 탄소와 접촉시키고, 이에 의해 붕소-및/또는 인-함유 오염 물질을 전술한 기류에서 제거함을 특징으로 하는 수소 기류에서 붕소-및/또는 인-함유 오염 물질의 양을 감소시키는 방법.
- 제1항에 있어서, 전술한 온도가 -101℃∼-173℃의 범위내에 있음을 특징으로 하는 방법.
- 폴리실리콘을 제조하는 유동 베드 반응기로 재순환시키기 위한 수소의 품질 향상 방법에 있어서, 상기 반응기에서 나오는 배출 기체를 극저온(cryogenic temperature)에서 활성 탄소와 접촉 시키고, 이에 의해 붕소-및/또는 인-함유 불순물을 전술한 배출 기계에서 제거하여 품질 향상된 수소를 형성시키고 상기 품질 향상된 수소를 전술한 반응기로 재순환시킴을 특징으로 하는 수소의 품질 향상 방법.
- 실리콘의 화학적 증기 증착에 의하여 실란에서 실리콘을 제조하는 유동 배드 반응기에서 나오는 기체상 수소 배출 기체의 품질을 향상시키는 방법에 있어서, 전술한 수소 배출 기체를 극저온에서 활성 탄소와 접촉 시키고, 이에 의해 전술한 배출 수소 중의 붕소-및/또는 인-함유 오염 물질의 양을 감소시켜 품질 향상된 수소 생성물을 형성시키고, 붕소 및/또는 인 함량이 감소된 품질 향상된 수소 생성물을 실란용 담체로서 전술한 반응기로 재순환시킴을 특징으로 하는 기체상 수소 배출 기체의 품질 향상 방법.
- 제4항에 있어서, 전술한 온도가 -101℃∼-173℃임을 특징으로 하는 방법.
- 제4항에 있어서, 6.9∼344.8kPa의 압력에서 수행함을 특징으로 하는 방법.
- 제4항에 있어서, 전술한 수소 배출 기체를 활성 탄소로 처리하기 이전에 처리하여 실리콘 분말 또는 미분질 입자를 제거함을 특징으로 하는 방법.
- 제4항에 있어서, 전술한 활성 탄소가 300∼2500㎥/g 의 표시 면적을 가짐을 특징으로 하는 방법.
- 제4항에 있어서, 전술한 활성 탄소를 추가의 붕소-및/또는 인-함유 성분을 흡착하는 그의 능력이 감소된 후 재생함을 특징으로 하는 방법.
- 제9항에 있어서, 전술한 재생은 수소를 청정 기체로서 사용하여 175∼200℃의 온도에서 활성 탄소를 청정함으로써 수행됨을 특징으로 하는 방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US92,638 | 1987-09-03 | ||
US092,638 | 1987-09-03 | ||
US07/092,638 US4871524A (en) | 1987-09-03 | 1987-09-03 | Hydrogen purification process |
Publications (2)
Publication Number | Publication Date |
---|---|
KR890004761A true KR890004761A (ko) | 1989-05-09 |
KR960014903B1 KR960014903B1 (ko) | 1996-10-21 |
Family
ID=22234284
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019880011398A KR960014903B1 (ko) | 1987-09-03 | 1988-09-03 | 수소 정제 방법 |
Country Status (6)
Country | Link |
---|---|
US (1) | US4871524A (ko) |
EP (1) | EP0305867B1 (ko) |
JP (1) | JP2641265B2 (ko) |
KR (1) | KR960014903B1 (ko) |
CA (1) | CA1289454C (ko) |
DE (1) | DE3863411D1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6999696B2 (en) | 1995-03-27 | 2006-02-14 | Canon Kabushiki Kaisha | Coupling part, photosensitive drum, process cartridge and electrophotographic image forming apparatus |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5672683A (en) * | 1989-09-07 | 1997-09-30 | Alkermes, Inc. | Transferrin neuropharmaceutical agent fusion protein |
US20050061147A1 (en) * | 2003-09-18 | 2005-03-24 | Marganski Paul J. | Chemisorbent system for abatement of effluent species |
US20060105105A1 (en) * | 2004-11-12 | 2006-05-18 | Memc Electronic Materials, Inc. | High purity granular silicon and method of manufacturing the same |
DE102011078676A1 (de) | 2011-07-05 | 2013-01-10 | Wacker Chemie Ag | Verfahren zur Produktion von Polysilicium |
DE102014221928A1 (de) | 2014-10-28 | 2016-04-28 | Wacker Chemie Ag | Wirbelschichtreaktor und Verfahren zur Herstellung von polykristallinem Siliciumgranulat |
Family Cites Families (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA644300A (en) * | 1962-07-03 | Schink Norbert | Pyrolytic production of hyperpure semiconductor material | |
GB262455A (en) * | 1925-12-04 | 1927-06-09 | Ig Farbenindustrie Ag | Improvements in the purification of hydrogen obtained by the interaction of phosphorus and steam |
US2634286A (en) * | 1949-11-07 | 1953-04-07 | Martin A Elliott | Production of hydrocarbon synthesis gas from coal |
US2671722A (en) * | 1950-03-23 | 1954-03-09 | Standard Oil Dev Co | Synthesis gas desulfurization |
US3130013A (en) * | 1953-09-25 | 1964-04-21 | Int Standard Electric Corp | Methods of producing silicon of high purity |
GB831216A (en) * | 1957-03-12 | 1960-03-23 | Standard Telephones Cables Ltd | Manufacture of pure silicon |
US3041141A (en) * | 1955-09-06 | 1962-06-26 | Baker Chem Co J T | Process of purifying silane |
GB851962A (en) * | 1958-06-09 | 1960-10-19 | Allied Chem | Production of pure silane |
NL130371C (ko) * | 1958-12-16 | 1900-01-01 | ||
US3012861A (en) * | 1960-01-15 | 1961-12-12 | Du Pont | Production of silicon |
FR1283407A (fr) * | 1960-02-06 | 1962-02-02 | Procédé de fabrication de silicium ou germanium en feuilles ou bandes | |
NL270527A (ko) * | 1960-10-26 | |||
US3377138A (en) * | 1966-01-07 | 1968-04-09 | Catalysts & Chem Inc | Hydrocarbon reforming |
US3628340A (en) * | 1969-11-13 | 1971-12-21 | Hydrocarbon Research Inc | Process for cryogenic purification of hydrogen |
JPS5227628B2 (ko) * | 1972-04-25 | 1977-07-21 | ||
US3839847A (en) * | 1972-07-05 | 1974-10-08 | Hydrocarbon Research Inc | Cryogenic hydrogen adsorption system |
US3864465A (en) * | 1972-12-15 | 1975-02-04 | Hydrocarbon Research Inc | Production Of High Purity Hydrogen |
US3963838A (en) * | 1974-05-24 | 1976-06-15 | Texas Instruments Incorporated | Method of operating a quartz fluidized bed reactor for the production of silicon |
US4154870A (en) * | 1974-11-01 | 1979-05-15 | Texas Instruments Incorporated | Silicon production and processing employing a fluidized bed |
DE2460515B2 (de) * | 1974-12-20 | 1976-10-28 | ^i/vtaimvti ·«* fvnYtMumg -zur IaU- | Verfahren und vorrichtung zur entfernung von gasfoermigen verunreinigungen aus wasserstoff |
US3992167A (en) * | 1975-04-02 | 1976-11-16 | Union Carbide Corporation | Low temperature refrigeration process for helium or hydrogen mixtures using mixed refrigerant |
US4242875A (en) * | 1978-05-10 | 1981-01-06 | C F Braun & Co. | Hydrogen cryogenic purification system |
GB2028289B (en) * | 1978-08-18 | 1982-09-02 | Schumacher Co J C | Producing silicon |
US4292344A (en) * | 1979-02-23 | 1981-09-29 | Union Carbide Corporation | Fluidized bed heating process and apparatus |
US4444811A (en) * | 1980-03-03 | 1984-04-24 | California Institute Of Technology | Fluidized bed silicon deposition from silane |
JPS58185426A (ja) * | 1982-04-20 | 1983-10-29 | Hitachi Ltd | 高純度シリコンの製造方法 |
US4751067A (en) * | 1982-06-22 | 1988-06-14 | Harry Levin | Process for making silicon from halosilanes and halosilicons |
JPS5945916A (ja) * | 1982-09-02 | 1984-03-15 | Denki Kagaku Kogyo Kk | 高純度シリコンの連続的製造方法 |
US4684513A (en) * | 1982-11-05 | 1987-08-04 | Union Carbide Corporation | Zone heating for fluidized bed silane pyrolysis |
JPS6077117A (ja) * | 1983-09-30 | 1985-05-01 | Sumitomo Metal Ind Ltd | シリコン粒の製造方法 |
JPS6077116A (ja) * | 1983-09-30 | 1985-05-01 | Sumitomo Metal Ind Ltd | シリコン粒の製造方法 |
JPS60169078A (ja) * | 1984-12-21 | 1985-09-02 | 株式会社日立製作所 | 低温精製器 |
US4784840A (en) * | 1986-08-25 | 1988-11-15 | Ethyl Corporation | Polysilicon fluid bed process and product |
SU1430020A2 (ru) * | 1987-01-17 | 1988-10-15 | Научно-Производственное Объединение Чайной Промышленности | Устройство дл резки ча |
-
1987
- 1987-09-03 US US07/092,638 patent/US4871524A/en not_active Expired - Lifetime
-
1988
- 1988-08-11 CA CA000574472A patent/CA1289454C/en not_active Expired - Lifetime
- 1988-08-23 DE DE8888113730T patent/DE3863411D1/de not_active Expired - Lifetime
- 1988-08-23 EP EP88113730A patent/EP0305867B1/en not_active Expired - Lifetime
- 1988-09-02 JP JP63218691A patent/JP2641265B2/ja not_active Expired - Lifetime
- 1988-09-03 KR KR1019880011398A patent/KR960014903B1/ko not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6999696B2 (en) | 1995-03-27 | 2006-02-14 | Canon Kabushiki Kaisha | Coupling part, photosensitive drum, process cartridge and electrophotographic image forming apparatus |
US7092655B2 (en) | 1995-03-27 | 2006-08-15 | Canon Kabushiki Kaisha | Coupling part, photosensitive drum, process cartridge and electrophotographic image forming apparatus |
Also Published As
Publication number | Publication date |
---|---|
KR960014903B1 (ko) | 1996-10-21 |
EP0305867A3 (en) | 1989-08-02 |
JP2641265B2 (ja) | 1997-08-13 |
EP0305867B1 (en) | 1991-06-26 |
US4871524A (en) | 1989-10-03 |
DE3863411D1 (de) | 1991-08-01 |
EP0305867A2 (en) | 1989-03-08 |
CA1289454C (en) | 1991-09-24 |
JPH01103901A (ja) | 1989-04-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5674463A (en) | Process for the purification of carbon dioxide | |
US5051117A (en) | Process for removing gaseous contaminating compounds from carrier gases containing halosilane compounds | |
US2987139A (en) | Manufacture of pure silicon | |
US20060099123A1 (en) | Utilisation of waste gas streams | |
US2979384A (en) | Process for production of hydrogen and sulfur | |
MY117711A (en) | Purification of gases | |
GB2188620A (en) | One-step process for purifying an inert gas | |
KR100199883B1 (ko) | 실리콘 결정로로부터 아르곤을 회수하는 방법 | |
US3284158A (en) | Method of and apparatus for removing sulfur compounds from gases | |
CS251591A3 (en) | Process and apparatus for cleaning an adsorbent containing carbon | |
US3864465A (en) | Production Of High Purity Hydrogen | |
KR890004761A (ko) | 수소 정제 방법 | |
KR920702632A (ko) | 배기가스 특히 폐기물연소 설비에서 배출된 배기가스의 정화장치 | |
JP2570409B2 (ja) | クロロポリシランの精製方法 | |
JPH05124808A (ja) | 高純度炭酸ガス精製プラントにおける原料ガスの処理方法 | |
JPH0660007B2 (ja) | 工業用ガス中含有のcos及びcs2化合物をh2sに加水分解する方法 | |
CA2256903A1 (en) | Air separation float glass system | |
JPH0340902A (ja) | 水素化物ガスの精製方法 | |
JP2005145816A (ja) | 揮発性金属水素化物の精製方法及び装置、並びに精製された揮発性金属水素化物製品 | |
RU2088516C1 (ru) | Способ разложения газообразного сероводорода | |
SU146286A1 (ru) | Способ очистки водорода в колонне гиперсорбционного типа | |
JP2651611B2 (ja) | 水素化物ガスの精製方法 | |
US4976933A (en) | Hydrogen stream purification | |
KR102318490B1 (ko) | 이산화탄소 가스의 정제유닛 및 정제방법 | |
JPH04265217A (ja) | 一酸化炭素を主成分とするガスの精製方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
N231 | Notification of change of applicant | ||
G160 | Decision to publish patent application | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20101014 Year of fee payment: 15 |
|
EXPY | Expiration of term |