JPH0417887B2 - - Google Patents

Info

Publication number
JPH0417887B2
JPH0417887B2 JP57003759A JP375982A JPH0417887B2 JP H0417887 B2 JPH0417887 B2 JP H0417887B2 JP 57003759 A JP57003759 A JP 57003759A JP 375982 A JP375982 A JP 375982A JP H0417887 B2 JPH0417887 B2 JP H0417887B2
Authority
JP
Japan
Prior art keywords
raw material
carbon
reactor
gas
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57003759A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58120510A (ja
Inventor
Takane Myazaki
Shigeru Tatsuno
Kazushi Matsura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Original Assignee
Mitsubishi Kasei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Kasei Corp filed Critical Mitsubishi Kasei Corp
Priority to JP57003759A priority Critical patent/JPS58120510A/ja
Publication of JPS58120510A publication Critical patent/JPS58120510A/ja
Publication of JPH0417887B2 publication Critical patent/JPH0417887B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Carbon And Carbon Compounds (AREA)
JP57003759A 1982-01-13 1982-01-13 熱分解炭素を析出させる方法 Granted JPS58120510A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57003759A JPS58120510A (ja) 1982-01-13 1982-01-13 熱分解炭素を析出させる方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57003759A JPS58120510A (ja) 1982-01-13 1982-01-13 熱分解炭素を析出させる方法

Publications (2)

Publication Number Publication Date
JPS58120510A JPS58120510A (ja) 1983-07-18
JPH0417887B2 true JPH0417887B2 (enExample) 1992-03-26

Family

ID=11566098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57003759A Granted JPS58120510A (ja) 1982-01-13 1982-01-13 熱分解炭素を析出させる方法

Country Status (1)

Country Link
JP (1) JPS58120510A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0327169D0 (en) 2003-11-21 2003-12-24 Statoil Asa Method
KR101431197B1 (ko) * 2008-01-24 2014-09-17 삼성전자주식회사 원자층 증착설비 및 그의 원자층 증착방법
US8318269B2 (en) 2009-02-17 2012-11-27 Mcalister Technologies, Llc Induction for thermochemical processes, and associated systems and methods
US8623107B2 (en) * 2009-02-17 2014-01-07 Mcalister Technologies, Llc Gas hydrate conversion system for harvesting hydrocarbon hydrate deposits
US8821602B2 (en) 2011-08-12 2014-09-02 Mcalister Technologies, Llc Systems and methods for providing supplemental aqueous thermal energy

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5113754A (en) * 1974-07-09 1976-02-03 Toyama Chemical Co Ltd Shinkinaganma *44*3** okisoshikurohekishiru * fueniru ** ganma ketopuchirusan oyobi sonoenruinoseiho
JPS5143038A (en) * 1974-10-09 1976-04-13 Canon Kk Karaaterebijonkamera

Also Published As

Publication number Publication date
JPS58120510A (ja) 1983-07-18

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