JPH0410218B2 - - Google Patents

Info

Publication number
JPH0410218B2
JPH0410218B2 JP57082475A JP8247582A JPH0410218B2 JP H0410218 B2 JPH0410218 B2 JP H0410218B2 JP 57082475 A JP57082475 A JP 57082475A JP 8247582 A JP8247582 A JP 8247582A JP H0410218 B2 JPH0410218 B2 JP H0410218B2
Authority
JP
Japan
Prior art keywords
film
silicon
layer
molybdenum
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57082475A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58200531A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP57082475A priority Critical patent/JPS58200531A/ja
Publication of JPS58200531A publication Critical patent/JPS58200531A/ja
Publication of JPH0410218B2 publication Critical patent/JPH0410218B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/01Manufacture or treatment
    • H10D64/011Manufacture or treatment of electrodes ohmically coupled to a semiconductor

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP57082475A 1982-05-18 1982-05-18 半導体装置の製造方法 Granted JPS58200531A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57082475A JPS58200531A (ja) 1982-05-18 1982-05-18 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57082475A JPS58200531A (ja) 1982-05-18 1982-05-18 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS58200531A JPS58200531A (ja) 1983-11-22
JPH0410218B2 true JPH0410218B2 (enExample) 1992-02-24

Family

ID=13775532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57082475A Granted JPS58200531A (ja) 1982-05-18 1982-05-18 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS58200531A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07120672B2 (ja) * 1986-01-28 1995-12-20 日本電気株式会社 半導体装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS537276A (en) * 1976-07-08 1978-01-23 Kato Giichirou Ddc bias type field strength measuring instrument
JPS56158454A (en) * 1980-05-12 1981-12-07 Mitsubishi Electric Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS58200531A (ja) 1983-11-22

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