JPH0369877B2 - - Google Patents

Info

Publication number
JPH0369877B2
JPH0369877B2 JP60277362A JP27736285A JPH0369877B2 JP H0369877 B2 JPH0369877 B2 JP H0369877B2 JP 60277362 A JP60277362 A JP 60277362A JP 27736285 A JP27736285 A JP 27736285A JP H0369877 B2 JPH0369877 B2 JP H0369877B2
Authority
JP
Japan
Prior art keywords
diameter
line
crystal
detection
pulled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60277362A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62138387A (ja
Inventor
Toshio Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP27736285A priority Critical patent/JPS62138387A/ja
Publication of JPS62138387A publication Critical patent/JPS62138387A/ja
Publication of JPH0369877B2 publication Critical patent/JPH0369877B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP27736285A 1985-12-10 1985-12-10 引上結晶の直径測定装置 Granted JPS62138387A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27736285A JPS62138387A (ja) 1985-12-10 1985-12-10 引上結晶の直径測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27736285A JPS62138387A (ja) 1985-12-10 1985-12-10 引上結晶の直径測定装置

Publications (2)

Publication Number Publication Date
JPS62138387A JPS62138387A (ja) 1987-06-22
JPH0369877B2 true JPH0369877B2 (esLanguage) 1991-11-05

Family

ID=17582465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27736285A Granted JPS62138387A (ja) 1985-12-10 1985-12-10 引上結晶の直径測定装置

Country Status (1)

Country Link
JP (1) JPS62138387A (esLanguage)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2570316B2 (ja) * 1987-09-03 1997-01-08 セイコーエプソン株式会社 シールド材の製造方法
JPH0780717B2 (ja) * 1988-12-16 1995-08-30 コマツ電子金属株式会社 単結晶直径自動制御装置
JP2840213B2 (ja) 1995-10-30 1998-12-24 住友シチックス株式会社 単結晶の直径測定方法および直径測定装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE788782A (fr) * 1971-09-15 1973-03-13 Fmc Corp Cuisson d'agglomeres crus a l'air
JPS55130895A (en) * 1979-03-28 1980-10-11 Hitachi Ltd Single crystal preparing method and apparatus therefor

Also Published As

Publication number Publication date
JPS62138387A (ja) 1987-06-22

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees