JPH0367409A - 半導体装置 - Google Patents
半導体装置Info
- Publication number
- JPH0367409A JPH0367409A JP2157050A JP15705090A JPH0367409A JP H0367409 A JPH0367409 A JP H0367409A JP 2157050 A JP2157050 A JP 2157050A JP 15705090 A JP15705090 A JP 15705090A JP H0367409 A JPH0367409 A JP H0367409A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- liquid crystal
- aluminum
- electrode
- polycrystalline silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 17
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 17
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 21
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 6
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 25
- 239000010409 thin film Substances 0.000 abstract description 12
- 239000011159 matrix material Substances 0.000 abstract description 11
- 239000010408 film Substances 0.000 abstract description 8
- 239000011521 glass Substances 0.000 abstract description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 5
- 229910052710 silicon Inorganic materials 0.000 abstract description 5
- 239000010703 silicon Substances 0.000 abstract description 5
- 238000005530 etching Methods 0.000 abstract description 4
- 229910052751 metal Inorganic materials 0.000 abstract description 4
- 239000002184 metal Substances 0.000 abstract description 4
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 abstract description 4
- 229910001887 tin oxide Inorganic materials 0.000 abstract description 4
- 239000012780 transparent material Substances 0.000 abstract description 4
- 238000000206 photolithography Methods 0.000 abstract description 3
- 238000010438 heat treatment Methods 0.000 abstract description 2
- 239000012535 impurity Substances 0.000 abstract description 2
- 239000013078 crystal Substances 0.000 abstract 2
- 229920001296 polysiloxane Polymers 0.000 abstract 1
- 238000000034 method Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 229910003437 indium oxide Inorganic materials 0.000 description 3
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Thin Film Transistor (AREA)
- Non-Insulated Conductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2157050A JPH0367409A (ja) | 1990-06-15 | 1990-06-15 | 半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2157050A JPH0367409A (ja) | 1990-06-15 | 1990-06-15 | 半導体装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10429381A Division JPS585905A (ja) | 1981-07-02 | 1981-07-02 | 半導体装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6723094A Division JP2514166B2 (ja) | 1994-04-05 | 1994-04-05 | アクティブマトリックス液晶表示装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0367409A true JPH0367409A (ja) | 1991-03-22 |
| JPH0542832B2 JPH0542832B2 (enrdf_load_stackoverflow) | 1993-06-29 |
Family
ID=15641102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2157050A Granted JPH0367409A (ja) | 1990-06-15 | 1990-06-15 | 半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0367409A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7286870B2 (en) | 1994-10-06 | 2007-10-23 | Hitachi, Ltd. | Optical system for measuring metabolism in a body and imaging method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5437697A (en) * | 1977-08-30 | 1979-03-20 | Sharp Corp | Liquid crystal display unit of matrix type |
-
1990
- 1990-06-15 JP JP2157050A patent/JPH0367409A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5437697A (en) * | 1977-08-30 | 1979-03-20 | Sharp Corp | Liquid crystal display unit of matrix type |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7286870B2 (en) | 1994-10-06 | 2007-10-23 | Hitachi, Ltd. | Optical system for measuring metabolism in a body and imaging method |
| US7440794B2 (en) | 1994-10-06 | 2008-10-21 | Hitachi, Ltd. | Optical system for measuring metabolism in a body and imaging method |
| US7715904B2 (en) | 1994-10-06 | 2010-05-11 | Hitachi, Ltd. | Optical system for measuring metabolism in a body and imaging method |
| US8050744B2 (en) | 1994-10-06 | 2011-11-01 | Hitachi, Ltd. | Optical system for measuring metabolism in a body and imaging method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0542832B2 (enrdf_load_stackoverflow) | 1993-06-29 |
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