JPH036429B2 - - Google Patents
Info
- Publication number
- JPH036429B2 JPH036429B2 JP59000683A JP68384A JPH036429B2 JP H036429 B2 JPH036429 B2 JP H036429B2 JP 59000683 A JP59000683 A JP 59000683A JP 68384 A JP68384 A JP 68384A JP H036429 B2 JPH036429 B2 JP H036429B2
- Authority
- JP
- Japan
- Prior art keywords
- wall
- movable
- support section
- wafer carrier
- object support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 description 31
- 239000000428 dust Substances 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 2
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP68384A JPS60144542A (ja) | 1984-01-05 | 1984-01-05 | 搬送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP68384A JPS60144542A (ja) | 1984-01-05 | 1984-01-05 | 搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60144542A JPS60144542A (ja) | 1985-07-30 |
JPH036429B2 true JPH036429B2 (zh) | 1991-01-30 |
Family
ID=11480556
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP68384A Granted JPS60144542A (ja) | 1984-01-05 | 1984-01-05 | 搬送装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60144542A (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0250596B1 (en) * | 1985-11-26 | 1992-01-15 | SHIMIZU CONSTRUCTION Co. LTD. | Clean room |
JPS63203464A (ja) * | 1987-02-18 | 1988-08-23 | 神鋼電機株式会社 | 荷搬送用自走台車 |
JPH0334346A (ja) * | 1989-06-29 | 1991-02-14 | Tokyo Electron Ltd | デバイスキャリア包囲容器 |
JP4629286B2 (ja) * | 2001-09-18 | 2011-02-09 | 東京エレクトロン株式会社 | 無人搬送車 |
JP4538729B2 (ja) * | 2005-02-04 | 2010-09-08 | 株式会社ダイフク | 搬送車 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6033439A (ja) * | 1983-08-02 | 1985-02-20 | Nippon Muki Kk | 搬送用クリ−ンユニツト並に搬送法 |
-
1984
- 1984-01-05 JP JP68384A patent/JPS60144542A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6033439A (ja) * | 1983-08-02 | 1985-02-20 | Nippon Muki Kk | 搬送用クリ−ンユニツト並に搬送法 |
Also Published As
Publication number | Publication date |
---|---|
JPS60144542A (ja) | 1985-07-30 |
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