JPH036429B2 - - Google Patents

Info

Publication number
JPH036429B2
JPH036429B2 JP59000683A JP68384A JPH036429B2 JP H036429 B2 JPH036429 B2 JP H036429B2 JP 59000683 A JP59000683 A JP 59000683A JP 68384 A JP68384 A JP 68384A JP H036429 B2 JPH036429 B2 JP H036429B2
Authority
JP
Japan
Prior art keywords
wall
movable
support section
wafer carrier
object support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59000683A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60144542A (ja
Inventor
Takehide Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Priority to JP68384A priority Critical patent/JPS60144542A/ja
Publication of JPS60144542A publication Critical patent/JPS60144542A/ja
Publication of JPH036429B2 publication Critical patent/JPH036429B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP68384A 1984-01-05 1984-01-05 搬送装置 Granted JPS60144542A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP68384A JPS60144542A (ja) 1984-01-05 1984-01-05 搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP68384A JPS60144542A (ja) 1984-01-05 1984-01-05 搬送装置

Publications (2)

Publication Number Publication Date
JPS60144542A JPS60144542A (ja) 1985-07-30
JPH036429B2 true JPH036429B2 (zh) 1991-01-30

Family

ID=11480556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP68384A Granted JPS60144542A (ja) 1984-01-05 1984-01-05 搬送装置

Country Status (1)

Country Link
JP (1) JPS60144542A (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4838150A (en) * 1985-11-26 1989-06-13 Shimizu Construction Co., Ltd. Clean room
JPS63203464A (ja) * 1987-02-18 1988-08-23 神鋼電機株式会社 荷搬送用自走台車
JPH0334346A (ja) * 1989-06-29 1991-02-14 Tokyo Electron Ltd デバイスキャリア包囲容器
JP4629286B2 (ja) * 2001-09-18 2011-02-09 東京エレクトロン株式会社 無人搬送車
JP4538729B2 (ja) * 2005-02-04 2010-09-08 株式会社ダイフク 搬送車

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6033439A (ja) * 1983-08-02 1985-02-20 Nippon Muki Kk 搬送用クリ−ンユニツト並に搬送法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6033439A (ja) * 1983-08-02 1985-02-20 Nippon Muki Kk 搬送用クリ−ンユニツト並に搬送法

Also Published As

Publication number Publication date
JPS60144542A (ja) 1985-07-30

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