JPH0324445Y2 - - Google Patents
Info
- Publication number
- JPH0324445Y2 JPH0324445Y2 JP10024284U JP10024284U JPH0324445Y2 JP H0324445 Y2 JPH0324445 Y2 JP H0324445Y2 JP 10024284 U JP10024284 U JP 10024284U JP 10024284 U JP10024284 U JP 10024284U JP H0324445 Y2 JPH0324445 Y2 JP H0324445Y2
- Authority
- JP
- Japan
- Prior art keywords
- groove
- cart
- guided
- floor
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 230000003213 activating effect Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Current-Collector Devices For Electrically Propelled Vehicles (AREA)
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10024284U JPS6115670U (ja) | 1984-07-02 | 1984-07-02 | クリ−ンル−ム内の搬送設備 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10024284U JPS6115670U (ja) | 1984-07-02 | 1984-07-02 | クリ−ンル−ム内の搬送設備 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6115670U JPS6115670U (ja) | 1986-01-29 |
JPH0324445Y2 true JPH0324445Y2 (zh) | 1991-05-28 |
Family
ID=30659708
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10024284U Granted JPS6115670U (ja) | 1984-07-02 | 1984-07-02 | クリ−ンル−ム内の搬送設備 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6115670U (zh) |
-
1984
- 1984-07-02 JP JP10024284U patent/JPS6115670U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6115670U (ja) | 1986-01-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH11222122A (ja) | 分岐軌道を備えた搬送設備 | |
JPS6040304A (ja) | 格納設備 | |
JPH11180505A (ja) | 有軌道台車システム | |
JPH0324445Y2 (zh) | ||
JP3558012B2 (ja) | 搬送システム | |
JP2007217076A (ja) | 搬送車 | |
JP2700704B2 (ja) | 自走台車使用の搬送設備 | |
JP2003072609A (ja) | 自動車等の組立用搬送装置 | |
JPH09162262A (ja) | ウエハの搬送台車 | |
JPH036429B2 (zh) | ||
JPS636100Y2 (zh) | ||
JP3422480B2 (ja) | 無人搬送車システム | |
JP3801495B2 (ja) | 立体駐車場における入庫姿勢補正装置 | |
JPS6243738Y2 (zh) | ||
JP2019078002A (ja) | 外部車両乗降区画を備えた立体駐車装置 | |
JPH0735209B2 (ja) | クリ−ンル−ム等における被加工物の搬送方法および搬送装置 | |
JP2827760B2 (ja) | 移動棚使用の自動倉庫 | |
JPH0611846Y2 (ja) | 放射性廃棄物の運搬台車 | |
JP2837062B2 (ja) | 立体駐車場のエレベーター装置 | |
JPS603010Y2 (ja) | 台車利用の搬送装置 | |
JPH04159993A (ja) | 循環式エレベータのハッチ構造 | |
JPS6245963Y2 (zh) | ||
JPH01143720U (zh) | ||
JPH0235572Y2 (zh) | ||
JPH0111767Y2 (zh) |