JPH0360177B2 - - Google Patents

Info

Publication number
JPH0360177B2
JPH0360177B2 JP58040896A JP4089683A JPH0360177B2 JP H0360177 B2 JPH0360177 B2 JP H0360177B2 JP 58040896 A JP58040896 A JP 58040896A JP 4089683 A JP4089683 A JP 4089683A JP H0360177 B2 JPH0360177 B2 JP H0360177B2
Authority
JP
Japan
Prior art keywords
aluminum
gas
sputtering
film
compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58040896A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59167017A (ja
Inventor
Yoshimi Shiotani
Mamoru Maeda
Mikio Takagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58040896A priority Critical patent/JPS59167017A/ja
Publication of JPS59167017A publication Critical patent/JPS59167017A/ja
Publication of JPH0360177B2 publication Critical patent/JPH0360177B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/42—

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP58040896A 1983-03-11 1983-03-11 アルミニウムあるいはアルミニウム合金のスパツタ方法 Granted JPS59167017A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58040896A JPS59167017A (ja) 1983-03-11 1983-03-11 アルミニウムあるいはアルミニウム合金のスパツタ方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58040896A JPS59167017A (ja) 1983-03-11 1983-03-11 アルミニウムあるいはアルミニウム合金のスパツタ方法

Publications (2)

Publication Number Publication Date
JPS59167017A JPS59167017A (ja) 1984-09-20
JPH0360177B2 true JPH0360177B2 (en:Method) 1991-09-12

Family

ID=12593269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58040896A Granted JPS59167017A (ja) 1983-03-11 1983-03-11 アルミニウムあるいはアルミニウム合金のスパツタ方法

Country Status (1)

Country Link
JP (1) JPS59167017A (en:Method)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61245525A (ja) * 1985-04-23 1986-10-31 Fujitsu Ltd 金属薄膜の製造方法
GB8516580D0 (en) * 1985-07-01 1985-08-07 Atomic Energy Authority Uk Coating improvements
JP4865200B2 (ja) * 2003-08-07 2012-02-01 キヤノン株式会社 ナノ構造体及びその製造方法

Also Published As

Publication number Publication date
JPS59167017A (ja) 1984-09-20

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