JPH0354859B2 - - Google Patents
Info
- Publication number
- JPH0354859B2 JPH0354859B2 JP11271784A JP11271784A JPH0354859B2 JP H0354859 B2 JPH0354859 B2 JP H0354859B2 JP 11271784 A JP11271784 A JP 11271784A JP 11271784 A JP11271784 A JP 11271784A JP H0354859 B2 JPH0354859 B2 JP H0354859B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- semiconductor wafer
- pair
- air block
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 36
- 230000032258 transport Effects 0.000 claims description 11
- 230000007246 mechanism Effects 0.000 claims description 10
- 230000007723 transport mechanism Effects 0.000 claims description 7
- 238000007664 blowing Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 87
- 238000000034 method Methods 0.000 description 8
- 238000007667 floating Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11271784A JPS60257148A (ja) | 1984-05-31 | 1984-05-31 | ウェーハ位置決め装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11271784A JPS60257148A (ja) | 1984-05-31 | 1984-05-31 | ウェーハ位置決め装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60257148A JPS60257148A (ja) | 1985-12-18 |
| JPH0354859B2 true JPH0354859B2 (ko) | 1991-08-21 |
Family
ID=14593751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11271784A Granted JPS60257148A (ja) | 1984-05-31 | 1984-05-31 | ウェーハ位置決め装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60257148A (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104084730A (zh) * | 2014-04-02 | 2014-10-08 | 太原风华信息装备股份有限公司 | 太阳能电池片串焊机的电池片定位机构 |
-
1984
- 1984-05-31 JP JP11271784A patent/JPS60257148A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60257148A (ja) | 1985-12-18 |
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