JPH035066B2 - - Google Patents

Info

Publication number
JPH035066B2
JPH035066B2 JP61304944A JP30494486A JPH035066B2 JP H035066 B2 JPH035066 B2 JP H035066B2 JP 61304944 A JP61304944 A JP 61304944A JP 30494486 A JP30494486 A JP 30494486A JP H035066 B2 JPH035066 B2 JP H035066B2
Authority
JP
Japan
Prior art keywords
insulating film
layer wiring
mode
wiring body
transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61304944A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6323348A (ja
Inventor
Kazunari Shirai
Takehide Shirato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP61304944A priority Critical patent/JPS6323348A/ja
Publication of JPS6323348A publication Critical patent/JPS6323348A/ja
Publication of JPH035066B2 publication Critical patent/JPH035066B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0165—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs the components including complementary IGFETs, e.g. CMOS devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP61304944A 1986-12-18 1986-12-18 半導体装置の製造方法 Granted JPS6323348A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61304944A JPS6323348A (ja) 1986-12-18 1986-12-18 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61304944A JPS6323348A (ja) 1986-12-18 1986-12-18 半導体装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP15835478A Division JPS5583265A (en) 1978-12-19 1978-12-19 Semiconductor device and method of fabricating the same

Publications (2)

Publication Number Publication Date
JPS6323348A JPS6323348A (ja) 1988-01-30
JPH035066B2 true JPH035066B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-01-24

Family

ID=17939196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61304944A Granted JPS6323348A (ja) 1986-12-18 1986-12-18 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6323348A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2558144B2 (ja) * 1988-04-22 1996-11-27 富士通株式会社 半導体装置の製造方法
JPH10308497A (ja) * 1997-05-08 1998-11-17 Mitsubishi Electric Corp 半導体装置およびその製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS542548B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-02-26 1979-02-08
JPS5417269B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-04-26 1979-06-28
JPS5118483A (en) * 1974-08-06 1976-02-14 Matsushita Electric Ind Co Ltd Zetsuengeeto fet shusekikairo
JPS5583265A (en) * 1978-12-19 1980-06-23 Fujitsu Ltd Semiconductor device and method of fabricating the same

Also Published As

Publication number Publication date
JPS6323348A (ja) 1988-01-30

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