JPH0348160B2 - - Google Patents

Info

Publication number
JPH0348160B2
JPH0348160B2 JP58196054A JP19605483A JPH0348160B2 JP H0348160 B2 JPH0348160 B2 JP H0348160B2 JP 58196054 A JP58196054 A JP 58196054A JP 19605483 A JP19605483 A JP 19605483A JP H0348160 B2 JPH0348160 B2 JP H0348160B2
Authority
JP
Japan
Prior art keywords
crystal
temperature
melt
speed
pulling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58196054A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6090896A (ja
Inventor
Takashi Shimada
Tsuguo Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP58196054A priority Critical patent/JPS6090896A/ja
Publication of JPS6090896A publication Critical patent/JPS6090896A/ja
Publication of JPH0348160B2 publication Critical patent/JPH0348160B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10Inorganic compounds or compositions
    • C30B29/40AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C30B29/42Gallium arsenide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP58196054A 1983-10-21 1983-10-21 ガリウム砒素単結晶の製造方法 Granted JPS6090896A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58196054A JPS6090896A (ja) 1983-10-21 1983-10-21 ガリウム砒素単結晶の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58196054A JPS6090896A (ja) 1983-10-21 1983-10-21 ガリウム砒素単結晶の製造方法

Publications (2)

Publication Number Publication Date
JPS6090896A JPS6090896A (ja) 1985-05-22
JPH0348160B2 true JPH0348160B2 (enrdf_load_stackoverflow) 1991-07-23

Family

ID=16351426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58196054A Granted JPS6090896A (ja) 1983-10-21 1983-10-21 ガリウム砒素単結晶の製造方法

Country Status (1)

Country Link
JP (1) JPS6090896A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01188500A (ja) * 1988-01-19 1989-07-27 Nippon Mining Co Ltd 化合物半導体単結晶の製造方法

Also Published As

Publication number Publication date
JPS6090896A (ja) 1985-05-22

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