JPH0347736B2 - - Google Patents

Info

Publication number
JPH0347736B2
JPH0347736B2 JP61213424A JP21342486A JPH0347736B2 JP H0347736 B2 JPH0347736 B2 JP H0347736B2 JP 61213424 A JP61213424 A JP 61213424A JP 21342486 A JP21342486 A JP 21342486A JP H0347736 B2 JPH0347736 B2 JP H0347736B2
Authority
JP
Japan
Prior art keywords
foreign matter
foreign
chip area
size
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61213424A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6369244A (ja
Inventor
Toshiaki Yanai
Ryoji Nemoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP21342486A priority Critical patent/JPS6369244A/ja
Publication of JPS6369244A publication Critical patent/JPS6369244A/ja
Publication of JPH0347736B2 publication Critical patent/JPH0347736B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP21342486A 1986-09-10 1986-09-10 ウエハ異物検査装置 Granted JPS6369244A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21342486A JPS6369244A (ja) 1986-09-10 1986-09-10 ウエハ異物検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21342486A JPS6369244A (ja) 1986-09-10 1986-09-10 ウエハ異物検査装置

Publications (2)

Publication Number Publication Date
JPS6369244A JPS6369244A (ja) 1988-03-29
JPH0347736B2 true JPH0347736B2 (OSRAM) 1991-07-22

Family

ID=16638994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21342486A Granted JPS6369244A (ja) 1986-09-10 1986-09-10 ウエハ異物検査装置

Country Status (1)

Country Link
JP (1) JPS6369244A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6356845B1 (ja) 2017-02-13 2018-07-11 ファナック株式会社 検査システムの動作プログラムを生成する装置および方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5538032A (en) * 1978-09-11 1980-03-17 Hitachi Ltd Method of setting inspection region
JPS5555206A (en) * 1978-10-20 1980-04-23 Hitachi Electronics Eng Co Ltd Inspection data processing system for defect on face plate
JPS5961762A (ja) * 1982-10-01 1984-04-09 Nippon Kogaku Kk <Nikon> 異物検査装置

Also Published As

Publication number Publication date
JPS6369244A (ja) 1988-03-29

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