JPH0378928B2 - - Google Patents

Info

Publication number
JPH0378928B2
JPH0378928B2 JP60140149A JP14014985A JPH0378928B2 JP H0378928 B2 JPH0378928 B2 JP H0378928B2 JP 60140149 A JP60140149 A JP 60140149A JP 14014985 A JP14014985 A JP 14014985A JP H0378928 B2 JPH0378928 B2 JP H0378928B2
Authority
JP
Japan
Prior art keywords
foreign object
foreign
information
specifying
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60140149A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6211140A (ja
Inventor
Toshiaki Yanai
Takahiro Ninomya
Takuro Hosoe
Juzo Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP60140149A priority Critical patent/JPS6211140A/ja
Publication of JPS6211140A publication Critical patent/JPS6211140A/ja
Publication of JPH0378928B2 publication Critical patent/JPH0378928B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP60140149A 1985-06-28 1985-06-28 異物検査装置 Granted JPS6211140A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60140149A JPS6211140A (ja) 1985-06-28 1985-06-28 異物検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60140149A JPS6211140A (ja) 1985-06-28 1985-06-28 異物検査装置

Publications (2)

Publication Number Publication Date
JPS6211140A JPS6211140A (ja) 1987-01-20
JPH0378928B2 true JPH0378928B2 (OSRAM) 1991-12-17

Family

ID=15262010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60140149A Granted JPS6211140A (ja) 1985-06-28 1985-06-28 異物検査装置

Country Status (1)

Country Link
JP (1) JPS6211140A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2548623B2 (ja) * 1990-07-09 1996-10-30 株式会社フジタ 鉄骨鉄筋コンクリート造柱、梁接合部の付着破壊防止用梁主筋の定着構造

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54101390A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspector
JPS5674665A (en) * 1979-11-26 1981-06-20 Nec Corp Semiconductor element characteristic testing device
JPS57148928A (en) * 1981-03-09 1982-09-14 Olympus Optical Co Apparatus for controlling leading end of endoscope
JPS6015939A (ja) * 1983-07-08 1985-01-26 Hitachi Ltd 異物検査装置
JPS6069513A (ja) * 1983-09-08 1985-04-20 Furuno Electric Co Ltd 航跡記録装置

Also Published As

Publication number Publication date
JPS6211140A (ja) 1987-01-20

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