JPH0375055B2 - - Google Patents
Info
- Publication number
- JPH0375055B2 JPH0375055B2 JP60140148A JP14014885A JPH0375055B2 JP H0375055 B2 JPH0375055 B2 JP H0375055B2 JP 60140148 A JP60140148 A JP 60140148A JP 14014885 A JP14014885 A JP 14014885A JP H0375055 B2 JPH0375055 B2 JP H0375055B2
- Authority
- JP
- Japan
- Prior art keywords
- foreign object
- foreign
- foreign matter
- inspected
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 claims description 41
- 230000000007 visual effect Effects 0.000 claims description 29
- 235000012431 wafers Nutrition 0.000 description 43
- 238000012545 processing Methods 0.000 description 17
- 238000000034 method Methods 0.000 description 12
- 238000001514 detection method Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 239000000126 substance Substances 0.000 description 7
- 239000002245 particle Substances 0.000 description 6
- 230000010287 polarization Effects 0.000 description 5
- 238000000926 separation method Methods 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 238000011179 visual inspection Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 239000000872 buffer Substances 0.000 description 2
- 230000003993 interaction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60140148A JPS6211139A (ja) | 1985-06-28 | 1985-06-28 | 異物検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60140148A JPS6211139A (ja) | 1985-06-28 | 1985-06-28 | 異物検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6211139A JPS6211139A (ja) | 1987-01-20 |
| JPH0375055B2 true JPH0375055B2 (OSRAM) | 1991-11-28 |
Family
ID=15261986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60140148A Granted JPS6211139A (ja) | 1985-06-28 | 1985-06-28 | 異物検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6211139A (OSRAM) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0354064U (OSRAM) * | 1989-09-27 | 1991-05-24 | ||
| JP6212843B2 (ja) * | 2012-09-05 | 2017-10-18 | 大日本印刷株式会社 | 異物検査装置、異物検査方法 |
| JP6119785B2 (ja) * | 2015-03-17 | 2017-04-26 | 大日本印刷株式会社 | 異物検査装置、異物検査方法 |
| WO2025057769A1 (ja) * | 2023-09-14 | 2025-03-20 | 学校法人関西学院 | 基板の評価方法、基板の評価装置 |
-
1985
- 1985-06-28 JP JP60140148A patent/JPS6211139A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6211139A (ja) | 1987-01-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0375055B2 (OSRAM) | ||
| JP2524532B2 (ja) | ウエハ異物検査装置 | |
| JPH0375054B2 (OSRAM) | ||
| JPH0378927B2 (OSRAM) | ||
| JPH0375053B2 (OSRAM) | ||
| JPH0378928B2 (OSRAM) | ||
| JPH0378929B2 (OSRAM) | ||
| JPS6211136A (ja) | 異物検査装置 | |
| JPS6269151A (ja) | ウエハ異物検査装置 | |
| JPH0515219B2 (OSRAM) | ||
| JPS6211141A (ja) | 異物検査装置 | |
| JP3017839B2 (ja) | 欠陥検査方法及び検査装置 | |
| JPH0363818B2 (OSRAM) | ||
| JPS61278739A (ja) | 異物検査装置 | |
| JPS6269149A (ja) | ウエハ異物検査装置 | |
| JPS6211149A (ja) | 異物検査装置 | |
| JPS6276732A (ja) | 異物検査装置 | |
| JPS6269150A (ja) | ウエハ異物検査装置 | |
| JPH0516740B2 (OSRAM) | ||
| JPH0363817B2 (OSRAM) | ||
| JPH0347736B2 (OSRAM) | ||
| KR200155175Y1 (ko) | 반도체 웨이퍼상의 이물질 검사 장치 | |
| JPH01143334A (ja) | マスクの欠陥検査方法及び欠陥検査装置 | |
| JPS6211142A (ja) | 異物検査装置 | |
| JPH10202476A (ja) | スローアウェイチップの検査方法および検査装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| LAPS | Cancellation because of no payment of annual fees |