JPH0343230Y2 - - Google Patents
Info
- Publication number
- JPH0343230Y2 JPH0343230Y2 JP14043686U JP14043686U JPH0343230Y2 JP H0343230 Y2 JPH0343230 Y2 JP H0343230Y2 JP 14043686 U JP14043686 U JP 14043686U JP 14043686 U JP14043686 U JP 14043686U JP H0343230 Y2 JPH0343230 Y2 JP H0343230Y2
- Authority
- JP
- Japan
- Prior art keywords
- sic
- substrate
- target material
- sputtering
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013077 target material Substances 0.000 claims description 21
- 238000006243 chemical reaction Methods 0.000 claims description 14
- 239000000758 substrate Substances 0.000 description 21
- 238000000034 method Methods 0.000 description 13
- 238000004544 sputter deposition Methods 0.000 description 11
- 239000002244 precipitate Substances 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000005245 sintering Methods 0.000 description 5
- 229910003923 SiC 4 Inorganic materials 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14043686U JPH0343230Y2 (de) | 1986-09-12 | 1986-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14043686U JPH0343230Y2 (de) | 1986-09-12 | 1986-09-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6346464U JPS6346464U (de) | 1988-03-29 |
| JPH0343230Y2 true JPH0343230Y2 (de) | 1991-09-10 |
Family
ID=31047287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14043686U Expired JPH0343230Y2 (de) | 1986-09-12 | 1986-09-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0343230Y2 (de) |
-
1986
- 1986-09-12 JP JP14043686U patent/JPH0343230Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6346464U (de) | 1988-03-29 |
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