JPH0343173B2 - - Google Patents

Info

Publication number
JPH0343173B2
JPH0343173B2 JP60203186A JP20318685A JPH0343173B2 JP H0343173 B2 JPH0343173 B2 JP H0343173B2 JP 60203186 A JP60203186 A JP 60203186A JP 20318685 A JP20318685 A JP 20318685A JP H0343173 B2 JPH0343173 B2 JP H0343173B2
Authority
JP
Japan
Prior art keywords
wafer
semiconductor wafer
flat plate
cartridge
basket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60203186A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6265843A (ja
Inventor
Seijiro Kawada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denkoh Co Ltd
Original Assignee
Denkoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denkoh Co Ltd filed Critical Denkoh Co Ltd
Priority to JP20318685A priority Critical patent/JPS6265843A/ja
Publication of JPS6265843A publication Critical patent/JPS6265843A/ja
Publication of JPH0343173B2 publication Critical patent/JPH0343173B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP20318685A 1985-09-12 1985-09-12 半導体ウエハ取出し装置 Granted JPS6265843A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20318685A JPS6265843A (ja) 1985-09-12 1985-09-12 半導体ウエハ取出し装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20318685A JPS6265843A (ja) 1985-09-12 1985-09-12 半導体ウエハ取出し装置

Publications (2)

Publication Number Publication Date
JPS6265843A JPS6265843A (ja) 1987-03-25
JPH0343173B2 true JPH0343173B2 (OSRAM) 1991-07-01

Family

ID=16469881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20318685A Granted JPS6265843A (ja) 1985-09-12 1985-09-12 半導体ウエハ取出し装置

Country Status (1)

Country Link
JP (1) JPS6265843A (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0272542U (OSRAM) * 1988-11-18 1990-06-01
JPH085160Y2 (ja) * 1989-05-15 1996-02-14 カシオ計算機株式会社 基板移し替え治具
JP3069575B2 (ja) * 1990-03-09 2000-07-24 東京エレクトロン株式会社 縦型熱処理装置
CN109230317B (zh) * 2018-09-25 2020-12-25 义柏科技（深圳）有限公司 一种用于半导体基板储存运输的转运舱

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5860553A (ja) * 1981-10-05 1983-04-11 Tokyo Denshi Kagaku Kabushiki 縦型自動プラズマ処理装置

Also Published As

Publication number Publication date
JPS6265843A (ja) 1987-03-25

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