JPH0342682Y2 - - Google Patents

Info

Publication number
JPH0342682Y2
JPH0342682Y2 JP1986022691U JP2269186U JPH0342682Y2 JP H0342682 Y2 JPH0342682 Y2 JP H0342682Y2 JP 1986022691 U JP1986022691 U JP 1986022691U JP 2269186 U JP2269186 U JP 2269186U JP H0342682 Y2 JPH0342682 Y2 JP H0342682Y2
Authority
JP
Japan
Prior art keywords
needle
contact
probe card
light
electrode pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986022691U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62134244U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986022691U priority Critical patent/JPH0342682Y2/ja
Publication of JPS62134244U publication Critical patent/JPS62134244U/ja
Application granted granted Critical
Publication of JPH0342682Y2 publication Critical patent/JPH0342682Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP1986022691U 1986-02-18 1986-02-18 Expired JPH0342682Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986022691U JPH0342682Y2 (enrdf_load_stackoverflow) 1986-02-18 1986-02-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986022691U JPH0342682Y2 (enrdf_load_stackoverflow) 1986-02-18 1986-02-18

Publications (2)

Publication Number Publication Date
JPS62134244U JPS62134244U (enrdf_load_stackoverflow) 1987-08-24
JPH0342682Y2 true JPH0342682Y2 (enrdf_load_stackoverflow) 1991-09-06

Family

ID=30820313

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986022691U Expired JPH0342682Y2 (enrdf_load_stackoverflow) 1986-02-18 1986-02-18

Country Status (1)

Country Link
JP (1) JPH0342682Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4219771A (en) * 1978-02-21 1980-08-26 Texas Instruments Incorporated Four-quadrant, multiprobe-edge sensor for semiconductor wafer probing
JPS60231336A (ja) * 1984-04-27 1985-11-16 Sumitomo Electric Ind Ltd プロ−ブ・カ−ド

Also Published As

Publication number Publication date
JPS62134244U (enrdf_load_stackoverflow) 1987-08-24

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