JPH0334233U - - Google Patents

Info

Publication number
JPH0334233U
JPH0334233U JP9389189U JP9389189U JPH0334233U JP H0334233 U JPH0334233 U JP H0334233U JP 9389189 U JP9389189 U JP 9389189U JP 9389189 U JP9389189 U JP 9389189U JP H0334233 U JPH0334233 U JP H0334233U
Authority
JP
Japan
Prior art keywords
control section
focusing
wafer
detection beam
controlled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9389189U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9389189U priority Critical patent/JPH0334233U/ja
Publication of JPH0334233U publication Critical patent/JPH0334233U/ja
Pending legal-status Critical Current

Links

JP9389189U 1989-08-11 1989-08-11 Pending JPH0334233U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9389189U JPH0334233U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-08-11 1989-08-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9389189U JPH0334233U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-08-11 1989-08-11

Publications (1)

Publication Number Publication Date
JPH0334233U true JPH0334233U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-04-04

Family

ID=31643251

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9389189U Pending JPH0334233U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-08-11 1989-08-11

Country Status (1)

Country Link
JP (1) JPH0334233U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005237643A (ja) * 2004-02-26 2005-09-08 Taiyo Parts Kk 昇降装置
JP2007125419A (ja) * 2007-01-11 2007-05-24 Takara Standard Co Ltd 昇降収納ラックの収納装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005237643A (ja) * 2004-02-26 2005-09-08 Taiyo Parts Kk 昇降装置
JP2007125419A (ja) * 2007-01-11 2007-05-24 Takara Standard Co Ltd 昇降収納ラックの収納装置

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