JPH0334131B2 - - Google Patents

Info

Publication number
JPH0334131B2
JPH0334131B2 JP21291181A JP21291181A JPH0334131B2 JP H0334131 B2 JPH0334131 B2 JP H0334131B2 JP 21291181 A JP21291181 A JP 21291181A JP 21291181 A JP21291181 A JP 21291181A JP H0334131 B2 JPH0334131 B2 JP H0334131B2
Authority
JP
Japan
Prior art keywords
temperature
substrate
thin film
magnetic recording
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP21291181A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58115634A (ja
Inventor
Ryuji Sugita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP21291181A priority Critical patent/JPS58115634A/ja
Publication of JPS58115634A publication Critical patent/JPS58115634A/ja
Publication of JPH0334131B2 publication Critical patent/JPH0334131B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/85—Coating a support with a magnetic layer by vapour deposition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
JP21291181A 1981-12-28 1981-12-28 磁気記録媒体の製造方法 Granted JPS58115634A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21291181A JPS58115634A (ja) 1981-12-28 1981-12-28 磁気記録媒体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21291181A JPS58115634A (ja) 1981-12-28 1981-12-28 磁気記録媒体の製造方法

Publications (2)

Publication Number Publication Date
JPS58115634A JPS58115634A (ja) 1983-07-09
JPH0334131B2 true JPH0334131B2 (enrdf_load_stackoverflow) 1991-05-21

Family

ID=16630316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21291181A Granted JPS58115634A (ja) 1981-12-28 1981-12-28 磁気記録媒体の製造方法

Country Status (1)

Country Link
JP (1) JPS58115634A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60150237A (ja) * 1984-01-14 1985-08-07 Sony Corp 磁気記録媒体の製造方法
JPS61115226A (ja) * 1984-11-08 1986-06-02 Fuji Photo Film Co Ltd 磁気記録媒体

Also Published As

Publication number Publication date
JPS58115634A (ja) 1983-07-09

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