JPH0332762B2 - - Google Patents

Info

Publication number
JPH0332762B2
JPH0332762B2 JP58183655A JP18365583A JPH0332762B2 JP H0332762 B2 JPH0332762 B2 JP H0332762B2 JP 58183655 A JP58183655 A JP 58183655A JP 18365583 A JP18365583 A JP 18365583A JP H0332762 B2 JPH0332762 B2 JP H0332762B2
Authority
JP
Japan
Prior art keywords
mask pattern
waveguide
mask
parts
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58183655A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6075805A (ja
Inventor
Hiroo Inoe
Kohei Kodera
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP18365583A priority Critical patent/JPS6075805A/ja
Publication of JPS6075805A publication Critical patent/JPS6075805A/ja
Publication of JPH0332762B2 publication Critical patent/JPH0332762B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Optical Integrated Circuits (AREA)
JP18365583A 1983-09-30 1983-09-30 光分岐導波路の作製法 Granted JPS6075805A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18365583A JPS6075805A (ja) 1983-09-30 1983-09-30 光分岐導波路の作製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18365583A JPS6075805A (ja) 1983-09-30 1983-09-30 光分岐導波路の作製法

Publications (2)

Publication Number Publication Date
JPS6075805A JPS6075805A (ja) 1985-04-30
JPH0332762B2 true JPH0332762B2 (enExample) 1991-05-14

Family

ID=16139602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18365583A Granted JPS6075805A (ja) 1983-09-30 1983-09-30 光分岐導波路の作製法

Country Status (1)

Country Link
JP (1) JPS6075805A (enExample)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56150773A (en) * 1980-04-23 1981-11-21 Canon Inc Developing device
JPS57155568A (en) * 1981-03-20 1982-09-25 Hitachi Metals Ltd Developing device
JPS58105176A (ja) * 1981-12-17 1983-06-22 Ricoh Co Ltd 乾式現像装置

Also Published As

Publication number Publication date
JPS6075805A (ja) 1985-04-30

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