JPH0332723B2 - - Google Patents
Info
- Publication number
- JPH0332723B2 JPH0332723B2 JP13755382A JP13755382A JPH0332723B2 JP H0332723 B2 JPH0332723 B2 JP H0332723B2 JP 13755382 A JP13755382 A JP 13755382A JP 13755382 A JP13755382 A JP 13755382A JP H0332723 B2 JPH0332723 B2 JP H0332723B2
- Authority
- JP
- Japan
- Prior art keywords
- value
- image
- defect
- threshold
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007547 defect Effects 0.000 claims description 114
- 238000006243 chemical reaction Methods 0.000 claims description 64
- 238000000034 method Methods 0.000 claims description 27
- 238000001514 detection method Methods 0.000 claims description 20
- 230000002950 deficient Effects 0.000 claims description 12
- 230000015654 memory Effects 0.000 description 68
- 238000010586 diagram Methods 0.000 description 13
- 230000003111 delayed effect Effects 0.000 description 7
- 238000007689 inspection Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 238000003672 processing method Methods 0.000 description 3
- 230000009466 transformation Effects 0.000 description 3
- 239000000047 product Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Sorting Of Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13755382A JPS5927206A (ja) | 1982-08-06 | 1982-08-06 | 欠陥パタ−ン検出方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13755382A JPS5927206A (ja) | 1982-08-06 | 1982-08-06 | 欠陥パタ−ン検出方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5927206A JPS5927206A (ja) | 1984-02-13 |
| JPH0332723B2 true JPH0332723B2 (OSRAM) | 1991-05-14 |
Family
ID=15201398
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13755382A Granted JPS5927206A (ja) | 1982-08-06 | 1982-08-06 | 欠陥パタ−ン検出方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5927206A (OSRAM) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4688939A (en) * | 1985-12-27 | 1987-08-25 | At&T Technologies, Inc. | Method and apparatus for inspecting articles |
| JPH01176722A (ja) * | 1987-12-31 | 1989-07-13 | Jiro Sasaoka | 沈降物の移送装置 |
| JP5123244B2 (ja) * | 2009-04-22 | 2013-01-23 | ヴィスコ・テクノロジーズ株式会社 | 形状欠損検査装置、形状モデリング装置および形状欠損検査プログラム |
| JP5649424B2 (ja) * | 2010-02-03 | 2015-01-07 | 大和ハウス工業株式会社 | 防水シート診断方法および診断装置 |
-
1982
- 1982-08-06 JP JP13755382A patent/JPS5927206A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5927206A (ja) | 1984-02-13 |
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