JPH0331111B2 - - Google Patents
Info
- Publication number
- JPH0331111B2 JPH0331111B2 JP26087784A JP26087784A JPH0331111B2 JP H0331111 B2 JPH0331111 B2 JP H0331111B2 JP 26087784 A JP26087784 A JP 26087784A JP 26087784 A JP26087784 A JP 26087784A JP H0331111 B2 JPH0331111 B2 JP H0331111B2
- Authority
- JP
- Japan
- Prior art keywords
- organic solvent
- pressure
- cleaned
- tank
- drying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003960 organic solvent Substances 0.000 claims description 22
- 238000001035 drying Methods 0.000 claims description 19
- 238000009835 boiling Methods 0.000 claims description 8
- 238000005406 washing Methods 0.000 claims description 4
- 239000002904 solvent Substances 0.000 description 16
- 230000000694 effects Effects 0.000 description 6
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004506 ultrasonic cleaning Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26087784A JPS61138582A (ja) | 1984-12-12 | 1984-12-12 | 有機溶剤蒸気乾燥方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26087784A JPS61138582A (ja) | 1984-12-12 | 1984-12-12 | 有機溶剤蒸気乾燥方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61138582A JPS61138582A (ja) | 1986-06-26 |
| JPH0331111B2 true JPH0331111B2 (enrdf_load_stackoverflow) | 1991-05-02 |
Family
ID=17353992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26087784A Granted JPS61138582A (ja) | 1984-12-12 | 1984-12-12 | 有機溶剤蒸気乾燥方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61138582A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6443384A (en) * | 1987-08-12 | 1989-02-15 | Hitachi Ltd | Steam washing method and washer |
| US5105556A (en) * | 1987-08-12 | 1992-04-21 | Hitachi, Ltd. | Vapor washing process and apparatus |
-
1984
- 1984-12-12 JP JP26087784A patent/JPS61138582A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61138582A (ja) | 1986-06-26 |
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