JPH0312373Y2 - - Google Patents
Info
- Publication number
- JPH0312373Y2 JPH0312373Y2 JP18558586U JP18558586U JPH0312373Y2 JP H0312373 Y2 JPH0312373 Y2 JP H0312373Y2 JP 18558586 U JP18558586 U JP 18558586U JP 18558586 U JP18558586 U JP 18558586U JP H0312373 Y2 JPH0312373 Y2 JP H0312373Y2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- cleaning liquid
- cooling
- cooling pipe
- steam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 101
- 238000001816 cooling Methods 0.000 claims description 74
- 239000007788 liquid Substances 0.000 claims description 46
- 238000013020 steam cleaning Methods 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 16
- 230000000694 effects Effects 0.000 claims description 7
- 230000002159 abnormal effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18558586U JPH0312373Y2 (enrdf_load_stackoverflow) | 1986-12-03 | 1986-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18558586U JPH0312373Y2 (enrdf_load_stackoverflow) | 1986-12-03 | 1986-12-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6390485U JPS6390485U (enrdf_load_stackoverflow) | 1988-06-11 |
| JPH0312373Y2 true JPH0312373Y2 (enrdf_load_stackoverflow) | 1991-03-25 |
Family
ID=31134353
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18558586U Expired JPH0312373Y2 (enrdf_load_stackoverflow) | 1986-12-03 | 1986-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0312373Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-12-03 JP JP18558586U patent/JPH0312373Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6390485U (enrdf_load_stackoverflow) | 1988-06-11 |
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