JPH0327108B2 - - Google Patents

Info

Publication number
JPH0327108B2
JPH0327108B2 JP4361384A JP4361384A JPH0327108B2 JP H0327108 B2 JPH0327108 B2 JP H0327108B2 JP 4361384 A JP4361384 A JP 4361384A JP 4361384 A JP4361384 A JP 4361384A JP H0327108 B2 JPH0327108 B2 JP H0327108B2
Authority
JP
Japan
Prior art keywords
film
acid
photosensitive
polyethyleneimine
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4361384A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60186835A (ja
Inventor
Akira Tomita
Toshiaki Fujimura
Masaru Nanhei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyobo Co Ltd
Original Assignee
Toyobo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyobo Co Ltd filed Critical Toyobo Co Ltd
Priority to JP4361384A priority Critical patent/JPS60186835A/ja
Publication of JPS60186835A publication Critical patent/JPS60186835A/ja
Publication of JPH0327108B2 publication Critical patent/JPH0327108B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/092Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by backside coating or layers, by lubricating-slip layers or means, by oxygen barrier layers or by stripping-release layers or means

Landscapes

  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Laminated Bodies (AREA)
JP4361384A 1984-03-06 1984-03-06 感光性積層体 Granted JPS60186835A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4361384A JPS60186835A (ja) 1984-03-06 1984-03-06 感光性積層体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4361384A JPS60186835A (ja) 1984-03-06 1984-03-06 感光性積層体

Publications (2)

Publication Number Publication Date
JPS60186835A JPS60186835A (ja) 1985-09-24
JPH0327108B2 true JPH0327108B2 (en, 2012) 1991-04-12

Family

ID=12668686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4361384A Granted JPS60186835A (ja) 1984-03-06 1984-03-06 感光性積層体

Country Status (1)

Country Link
JP (1) JPS60186835A (en, 2012)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63218942A (ja) * 1987-03-06 1988-09-12 Fuji Photo Film Co Ltd 受像材料および画像形成方法
DE3825836A1 (de) * 1988-07-29 1990-02-08 Hoechst Ag Photopolymerisierbares aufzeichnungsmaterial
US5273862A (en) * 1988-07-29 1993-12-28 Hoechst Aktiengesellschaft Photopolymerizable recording material comprising a cover layer substantially impermeable to oxygen, binds oxygen and is soluble in water at 20°C.
AU1373399A (en) * 1998-11-12 2000-06-05 Andrew Michael Thompson Priming composition for bonding photoresists on substrates

Also Published As

Publication number Publication date
JPS60186835A (ja) 1985-09-24

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