JPH0325404Y2 - - Google Patents

Info

Publication number
JPH0325404Y2
JPH0325404Y2 JP1986154748U JP15474886U JPH0325404Y2 JP H0325404 Y2 JPH0325404 Y2 JP H0325404Y2 JP 1986154748 U JP1986154748 U JP 1986154748U JP 15474886 U JP15474886 U JP 15474886U JP H0325404 Y2 JPH0325404 Y2 JP H0325404Y2
Authority
JP
Japan
Prior art keywords
substrate
frame
section
elevating
spin chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986154748U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6361139U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986154748U priority Critical patent/JPH0325404Y2/ja
Priority to US07/106,584 priority patent/US4846623A/en
Publication of JPS6361139U publication Critical patent/JPS6361139U/ja
Application granted granted Critical
Publication of JPH0325404Y2 publication Critical patent/JPH0325404Y2/ja
Expired legal-status Critical Current

Links

JP1986154748U 1986-10-08 1986-10-08 Expired JPH0325404Y2 (enExample)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1986154748U JPH0325404Y2 (enExample) 1986-10-08 1986-10-08
US07/106,584 US4846623A (en) 1986-10-08 1987-10-08 Wafer transferring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986154748U JPH0325404Y2 (enExample) 1986-10-08 1986-10-08

Publications (2)

Publication Number Publication Date
JPS6361139U JPS6361139U (enExample) 1988-04-22
JPH0325404Y2 true JPH0325404Y2 (enExample) 1991-06-03

Family

ID=31074830

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986154748U Expired JPH0325404Y2 (enExample) 1986-10-08 1986-10-08

Country Status (1)

Country Link
JP (1) JPH0325404Y2 (enExample)

Also Published As

Publication number Publication date
JPS6361139U (enExample) 1988-04-22

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