JPS6361139U - - Google Patents
Info
- Publication number
- JPS6361139U JPS6361139U JP15474886U JP15474886U JPS6361139U JP S6361139 U JPS6361139 U JP S6361139U JP 15474886 U JP15474886 U JP 15474886U JP 15474886 U JP15474886 U JP 15474886U JP S6361139 U JPS6361139 U JP S6361139U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- frame
- lifting
- base frame
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 21
- 230000003028 elevating effect Effects 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15474886U JPH0325404Y2 (enExample) | 1986-10-08 | 1986-10-08 | |
| US07/106,584 US4846623A (en) | 1986-10-08 | 1987-10-08 | Wafer transferring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15474886U JPH0325404Y2 (enExample) | 1986-10-08 | 1986-10-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6361139U true JPS6361139U (enExample) | 1988-04-22 |
| JPH0325404Y2 JPH0325404Y2 (enExample) | 1991-06-03 |
Family
ID=31074830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15474886U Expired JPH0325404Y2 (enExample) | 1986-10-08 | 1986-10-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325404Y2 (enExample) |
-
1986
- 1986-10-08 JP JP15474886U patent/JPH0325404Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0325404Y2 (enExample) | 1991-06-03 |
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