JPS6361139U - - Google Patents
Info
- Publication number
- JPS6361139U JPS6361139U JP15474886U JP15474886U JPS6361139U JP S6361139 U JPS6361139 U JP S6361139U JP 15474886 U JP15474886 U JP 15474886U JP 15474886 U JP15474886 U JP 15474886U JP S6361139 U JPS6361139 U JP S6361139U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- frame
- lifting
- base frame
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 21
- 230000003028 elevating effect Effects 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は基板移載具の斜視図、第２図は基板処
理部での縦断面図、第３図は基板移送系を示す概
略構成図、第４図は基板載置腕の斜視図、第５図
〜第７図はそれぞれ別の実施例を示す概略構成図
、第８図は従来の基板移載装置の斜視図である。
１……基板支持具、２……基板処理部、７……
基枠、９……昇降枠、１１……基板載置具、１４
……昇降ガイド部材、１６……昇降枠上昇支持レ
ール、１７・１８……昇降駆動手段。
FIG. 1 is a perspective view of the substrate transfer tool, FIG. 2 is a longitudinal sectional view of the substrate processing section, FIG. 3 is a schematic configuration diagram showing the substrate transfer system, and FIG. 4 is a perspective view of the substrate mounting arm. 5 to 7 are schematic configuration diagrams showing different embodiments, and FIG. 8 is a perspective view of a conventional substrate transfer device. 1...Substrate support tool, 2...Substrate processing section, 7...
Base frame, 9... Lifting frame, 11... Board mounting tool, 14
...Lifting guide member, 16... Lifting frame lifting support rail, 17, 18... Lifting drive means.
Claims (1)
基板支持具へ未処理基板を供給搬送し、前記基板
処理部の基板支持具から基板排出部へ処理ずみ基
板を排出搬送する基板移載装置において、 基板供給部から基板処理部を経て、基板排出部
に至る区間を往復移動する基枠と、基枠に対して
沿直方向へ案内するための昇降ガイド部材を介し
て組付けた昇降枠と、昇降枠に固設した基板載置
具と、基枠の往復移動方向に沿つて配置され、昇
降枠と接する昇降枠上昇支持レールと、昇降上昇
支持レールを上下に平行移動させる昇降駆動手段
とからなり、前記昇降枠が基枠とともに往復移動
し、かつ昇降枠支持レールの上下移動に連動して
基枠に対して昇降するようにしたことを特徴とす
る基板移載装置。[Claims for Utility Model Registration] In a substrate processing apparatus, unprocessed substrates are supplied and transported from a substrate supply section to a substrate support of a substrate processing section, and processed substrates are transferred from the substrate support of the substrate processing section to a substrate discharge section. A substrate transfer device for ejecting and transporting a substrate includes a base frame that reciprocates in a section from a substrate supply section to a substrate discharge section through a substrate processing section, and a lifting guide member that guides the base frame in a direction perpendicular to the base frame. The lifting frame assembled via the lifting frame, the board mounting tool fixed to the lifting frame, the lifting frame lifting support rail that is arranged along the reciprocating direction of the base frame and in contact with the lifting frame, and the lifting support rail that is mounted up and down. and an elevating drive means for moving the elevating frame in parallel with the base frame, the elevating frame reciprocating together with the base frame, and moving up and down with respect to the base frame in conjunction with the vertical movement of the elevating frame support rail. Transfer equipment.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15474886U JPH0325404Y2 (en) | 1986-10-08 | 1986-10-08 | |
| US07/106,584 US4846623A (en) | 1986-10-08 | 1987-10-08 | Wafer transferring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15474886U JPH0325404Y2 (en) | 1986-10-08 | 1986-10-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6361139U true JPS6361139U (en) | 1988-04-22 |
| JPH0325404Y2 JPH0325404Y2 (en) | 1991-06-03 |
Family
ID=31074830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15474886U Expired JPH0325404Y2 (en) | 1986-10-08 | 1986-10-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325404Y2 (en) |
-
1986
- 1986-10-08 JP JP15474886U patent/JPH0325404Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0325404Y2 (en) | 1991-06-03 |
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