JPH0315536B2 - - Google Patents
Info
- Publication number
- JPH0315536B2 JPH0315536B2 JP59201991A JP20199184A JPH0315536B2 JP H0315536 B2 JPH0315536 B2 JP H0315536B2 JP 59201991 A JP59201991 A JP 59201991A JP 20199184 A JP20199184 A JP 20199184A JP H0315536 B2 JPH0315536 B2 JP H0315536B2
- Authority
- JP
- Japan
- Prior art keywords
- transparent conductive
- layer
- film
- indium oxide
- conductive layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004544 sputter deposition Methods 0.000 claims description 30
- 229910003437 indium oxide Inorganic materials 0.000 claims description 26
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 26
- 229920000620 organic polymer Polymers 0.000 claims description 23
- 230000031700 light absorption Effects 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 13
- 229910052760 oxygen Inorganic materials 0.000 claims description 13
- 239000001301 oxygen Substances 0.000 claims description 13
- 238000002441 X-ray diffraction Methods 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 239000013078 crystal Substances 0.000 claims description 4
- 238000010521 absorption reaction Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 description 60
- 239000010410 layer Substances 0.000 description 55
- 230000000052 comparative effect Effects 0.000 description 14
- 238000010438 heat treatment Methods 0.000 description 14
- 239000000758 substrate Substances 0.000 description 7
- 239000010409 thin film Substances 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 5
- -1 polyhydantoin Substances 0.000 description 5
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 229910001882 dioxygen Inorganic materials 0.000 description 4
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 150000004706 metal oxides Chemical class 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 150000003961 organosilicon compounds Chemical class 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 3
- 229910006404 SnO 2 Inorganic materials 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 238000001771 vacuum deposition Methods 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- 229910001128 Sn alloy Inorganic materials 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 229910003087 TiOx Inorganic materials 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 230000001476 alcoholic effect Effects 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000002178 crystalline material Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 150000002902 organometallic compounds Chemical class 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- HLLICFJUWSZHRJ-UHFFFAOYSA-N tioxidazole Chemical compound CCCOC1=CC=C2N=C(NC(=O)OC)SC2=C1 HLLICFJUWSZHRJ-UHFFFAOYSA-N 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- 229920002284 Cellulose triacetate Polymers 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- 229910000846 In alloy Inorganic materials 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000002216 antistatic agent Substances 0.000 description 1
- 239000004760 aramid Substances 0.000 description 1
- 229920003235 aromatic polyamide Polymers 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229920001519 homopolymer Polymers 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Non-Insulated Conductors (AREA)
- Liquid Crystal (AREA)
- Electrodes Of Semiconductors (AREA)
- Photovoltaic Devices (AREA)
- Manufacturing Of Electric Cables (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
Description
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59201991A JPS6179647A (ja) | 1984-09-28 | 1984-09-28 | éæå°é»æ§ç©å±€äœåã³ãã®è£œé æ¹æ³ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59201991A JPS6179647A (ja) | 1984-09-28 | 1984-09-28 | éæå°é»æ§ç©å±€äœåã³ãã®è£œé æ¹æ³ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6179647A JPS6179647A (ja) | 1986-04-23 |
JPH0315536B2 true JPH0315536B2 (ja) | 1991-03-01 |
Family
ID=16450130
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59201991A Granted JPS6179647A (ja) | 1984-09-28 | 1984-09-28 | éæå°é»æ§ç©å±€äœåã³ãã®è£œé æ¹æ³ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6179647A (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0781076A2 (en) | 1995-12-20 | 1997-06-25 | Mitsui Toatsu Chemicals, Inc. | Transparent conductive laminate and electroluminescence element |
JP2003205567A (ja) | 2002-01-11 | 2003-07-22 | Nitto Denko Corp | éæå°é»æ§ãã£ã«ã çšè¡šé¢ä¿è·ãã£ã«ã åã³éæå°é»æ§ãã£ã«ã |
JP2010163680A (ja) * | 2008-12-19 | 2010-07-29 | Hitachi Zosen Corp | éæå°é»èã®è£œé æ¹æ³ |
WO2013183564A1 (ja) * | 2012-06-07 | 2013-12-12 | æ¥æ±é»å·¥æ ªåŒäŒç€Ÿ | éæå°é»æ§ãã£ã«ã |
US9305680B2 (en) | 2010-12-27 | 2016-04-05 | Nitto Denko Corporation | Transparent conductive film and manufacturing method therefor |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0818394B2 (ja) * | 1986-12-08 | 1996-02-28 | ã»ã€ã³ãŒé»åå·¥æ¥æ ªåŒäŒç€Ÿ | 衚瀺ããã« |
JP2525475B2 (ja) * | 1989-01-25 | 1996-08-21 | åžäººæ ªåŒäŒç€Ÿ | éæå°é»æ§ç©å±€äœ |
JPH02276630A (ja) * | 1989-01-25 | 1990-11-13 | Teijin Ltd | éæå°é»æ§ç©å±€äœããã³ãã®è£œé æ¹æ³ |
JP2000238178A (ja) | 1999-02-24 | 2000-09-05 | Teijin Ltd | éæå°é»ç©å±€äœ |
TW525195B (en) | 2000-03-28 | 2003-03-21 | Toyo Boseki | Transparent conductive film, transparent conductive sheet and touch panel |
JPWO2005041216A1 (ja) * | 2003-10-23 | 2007-11-29 | æ ªåŒäŒç€Ÿããªãã¹ãã³ | éæå°é»æ§åºæ¿ãè²çŽ å¢æå倪éœé»æ± çšé»æ¥µåã³è²çŽ å¢æå倪éœé»æ± |
JP5099893B2 (ja) | 2007-10-22 | 2012-12-19 | æ¥æ±é»å·¥æ ªåŒäŒç€Ÿ | éæå°é»æ§ãã£ã«ã ããã®è£œé æ¹æ³åã³ãããåããã¿ããããã« |
KR101277433B1 (ko) | 2008-09-26 | 2013-06-20 | ëì볎 ê°ë¶ìí€ê°ìŽì€ | í¬ëª ëì ì± íëŠ ë° í°ì¹ íšë |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5137957A (ja) * | 1974-09-27 | 1976-03-30 | Fuji Photo Film Co Ltd | |
JPS5262381A (en) * | 1975-11-19 | 1977-05-23 | Teijin Ltd | Transparent electroconductive mat film |
JPS59169846A (ja) * | 1983-03-17 | 1984-09-25 | æç¡åæ ªåŒäŒç€Ÿ | éæå°é»æ§ãã€ã«ã |
JPS6124102A (ja) * | 1984-07-12 | 1986-02-01 | æç¡åæ ªåŒäŒç€Ÿ | å°äœ |
-
1984
- 1984-09-28 JP JP59201991A patent/JPS6179647A/ja active Granted
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5137957A (ja) * | 1974-09-27 | 1976-03-30 | Fuji Photo Film Co Ltd | |
JPS5262381A (en) * | 1975-11-19 | 1977-05-23 | Teijin Ltd | Transparent electroconductive mat film |
JPS59169846A (ja) * | 1983-03-17 | 1984-09-25 | æç¡åæ ªåŒäŒç€Ÿ | éæå°é»æ§ãã€ã«ã |
JPS6124102A (ja) * | 1984-07-12 | 1986-02-01 | æç¡åæ ªåŒäŒç€Ÿ | å°äœ |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0781076A2 (en) | 1995-12-20 | 1997-06-25 | Mitsui Toatsu Chemicals, Inc. | Transparent conductive laminate and electroluminescence element |
JP2003205567A (ja) | 2002-01-11 | 2003-07-22 | Nitto Denko Corp | éæå°é»æ§ãã£ã«ã çšè¡šé¢ä¿è·ãã£ã«ã åã³éæå°é»æ§ãã£ã«ã |
JP2010163680A (ja) * | 2008-12-19 | 2010-07-29 | Hitachi Zosen Corp | éæå°é»èã®è£œé æ¹æ³ |
US9305680B2 (en) | 2010-12-27 | 2016-04-05 | Nitto Denko Corporation | Transparent conductive film and manufacturing method therefor |
WO2013183564A1 (ja) * | 2012-06-07 | 2013-12-12 | æ¥æ±é»å·¥æ ªåŒäŒç€Ÿ | éæå°é»æ§ãã£ã«ã |
Also Published As
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