JPH0313652B2 - - Google Patents
Info
- Publication number
- JPH0313652B2 JPH0313652B2 JP56192113A JP19211381A JPH0313652B2 JP H0313652 B2 JPH0313652 B2 JP H0313652B2 JP 56192113 A JP56192113 A JP 56192113A JP 19211381 A JP19211381 A JP 19211381A JP H0313652 B2 JPH0313652 B2 JP H0313652B2
- Authority
- JP
- Japan
- Prior art keywords
- original plate
- optical
- photoresist
- recording
- guide groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 30
- 229920002120 photoresistant polymer Polymers 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000011295 pitch Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000001427 coherent effect Effects 0.000 description 1
- 238000012217 deletion Methods 0.000 description 1
- 230000037430 deletion Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56192113A JPS5894149A (ja) | 1981-11-30 | 1981-11-30 | 光デイスクの光干渉型案内溝作製用原板の製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56192113A JPS5894149A (ja) | 1981-11-30 | 1981-11-30 | 光デイスクの光干渉型案内溝作製用原板の製造法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2510489A Division JPH0656672B2 (ja) | 1989-02-03 | 1989-02-03 | 光ディスクの光干渉型案内溝作製用原板の製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5894149A JPS5894149A (ja) | 1983-06-04 |
| JPH0313652B2 true JPH0313652B2 (enExample) | 1991-02-25 |
Family
ID=16285875
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56192113A Granted JPS5894149A (ja) | 1981-11-30 | 1981-11-30 | 光デイスクの光干渉型案内溝作製用原板の製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5894149A (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6284449A (ja) * | 1985-10-09 | 1987-04-17 | Nippon Telegr & Teleph Corp <Ntt> | 多数溝同時形成方法 |
| JP2754204B2 (ja) * | 1987-04-30 | 1998-05-20 | キヤノン株式会社 | 光記録媒体の製造方法 |
| JPH02127648A (ja) * | 1988-11-08 | 1990-05-16 | Matsushita Electric Ind Co Ltd | 光ディスク原盤の製造方法 |
| US7459241B2 (en) * | 2003-09-22 | 2008-12-02 | Seagate Technology Llc | Rotary apertured interferometric lithography (RAIL) |
| US8685628B2 (en) * | 2006-04-24 | 2014-04-01 | Stc.Unm | Large area patterning using interferometric lithography |
-
1981
- 1981-11-30 JP JP56192113A patent/JPS5894149A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5894149A (ja) | 1983-06-04 |
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