JPH0311675A - ジョセフソン接合素子の製造方法 - Google Patents

ジョセフソン接合素子の製造方法

Info

Publication number
JPH0311675A
JPH0311675A JP1146277A JP14627789A JPH0311675A JP H0311675 A JPH0311675 A JP H0311675A JP 1146277 A JP1146277 A JP 1146277A JP 14627789 A JP14627789 A JP 14627789A JP H0311675 A JPH0311675 A JP H0311675A
Authority
JP
Japan
Prior art keywords
gas
part electrode
etched
electrode
tunnel barrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1146277A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0587193B2 (enrdf_load_stackoverflow
Inventor
Masahiro Aoyanagi
昌宏 青柳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP1146277A priority Critical patent/JPH0311675A/ja
Publication of JPH0311675A publication Critical patent/JPH0311675A/ja
Publication of JPH0587193B2 publication Critical patent/JPH0587193B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP1146277A 1989-06-08 1989-06-08 ジョセフソン接合素子の製造方法 Granted JPH0311675A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1146277A JPH0311675A (ja) 1989-06-08 1989-06-08 ジョセフソン接合素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1146277A JPH0311675A (ja) 1989-06-08 1989-06-08 ジョセフソン接合素子の製造方法

Publications (2)

Publication Number Publication Date
JPH0311675A true JPH0311675A (ja) 1991-01-18
JPH0587193B2 JPH0587193B2 (enrdf_load_stackoverflow) 1993-12-15

Family

ID=15404088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1146277A Granted JPH0311675A (ja) 1989-06-08 1989-06-08 ジョセフソン接合素子の製造方法

Country Status (1)

Country Link
JP (1) JPH0311675A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58154280A (ja) * 1982-03-10 1983-09-13 Nippon Telegr & Teleph Corp <Ntt> トンネル形ジヨセフソン素子の作製方法
JPS6279684A (ja) * 1985-10-02 1987-04-13 Agency Of Ind Science & Technol ジヨセフソン集積回路の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58154280A (ja) * 1982-03-10 1983-09-13 Nippon Telegr & Teleph Corp <Ntt> トンネル形ジヨセフソン素子の作製方法
JPS6279684A (ja) * 1985-10-02 1987-04-13 Agency Of Ind Science & Technol ジヨセフソン集積回路の製造方法

Also Published As

Publication number Publication date
JPH0587193B2 (enrdf_load_stackoverflow) 1993-12-15

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term