JPH028454B2 - - Google Patents
Info
- Publication number
- JPH028454B2 JPH028454B2 JP58047022A JP4702283A JPH028454B2 JP H028454 B2 JPH028454 B2 JP H028454B2 JP 58047022 A JP58047022 A JP 58047022A JP 4702283 A JP4702283 A JP 4702283A JP H028454 B2 JPH028454 B2 JP H028454B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- active layer
- resist
- opening
- gaas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/80—FETs having rectifying junction gate electrodes
Landscapes
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58047022A JPS59172776A (ja) | 1983-03-23 | 1983-03-23 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58047022A JPS59172776A (ja) | 1983-03-23 | 1983-03-23 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59172776A JPS59172776A (ja) | 1984-09-29 |
JPH028454B2 true JPH028454B2 (en, 2012) | 1990-02-23 |
Family
ID=12763552
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58047022A Granted JPS59172776A (ja) | 1983-03-23 | 1983-03-23 | 半導体装置の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59172776A (en, 2012) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0750781B2 (ja) * | 1987-03-18 | 1995-05-31 | 富士通株式会社 | 化合物半導体集積回路装置 |
FR2972567B1 (fr) * | 2011-03-09 | 2013-03-22 | Soitec Silicon On Insulator | Méthode de formation d'une structure de ge sur iii/v sur isolant |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57106082A (en) * | 1980-12-23 | 1982-07-01 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of schottky junction type electric field effect transistor |
-
1983
- 1983-03-23 JP JP58047022A patent/JPS59172776A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS59172776A (ja) | 1984-09-29 |
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