JPH02673Y2 - - Google Patents
Info
- Publication number
- JPH02673Y2 JPH02673Y2 JP18289183U JP18289183U JPH02673Y2 JP H02673 Y2 JPH02673 Y2 JP H02673Y2 JP 18289183 U JP18289183 U JP 18289183U JP 18289183 U JP18289183 U JP 18289183U JP H02673 Y2 JPH02673 Y2 JP H02673Y2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- test object
- leak
- holder
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012360 testing method Methods 0.000 claims description 42
- 238000007689 inspection Methods 0.000 claims description 5
- 239000000523 sample Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 17
- 239000001307 helium Substances 0.000 description 16
- 229910052734 helium Inorganic materials 0.000 description 16
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 15
- 238000010586 diagram Methods 0.000 description 3
- 239000000284 extract Substances 0.000 description 1
- 150000002371 helium Chemical class 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18289183U JPS6090649U (ja) | 1983-11-27 | 1983-11-27 | リ−クテスト装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18289183U JPS6090649U (ja) | 1983-11-27 | 1983-11-27 | リ−クテスト装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6090649U JPS6090649U (ja) | 1985-06-21 |
| JPH02673Y2 true JPH02673Y2 (zh) | 1990-01-09 |
Family
ID=30395959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18289183U Granted JPS6090649U (ja) | 1983-11-27 | 1983-11-27 | リ−クテスト装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6090649U (zh) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19935293A1 (de) * | 1999-07-27 | 2001-02-01 | Leybold Vakuum Gmbh | Folienlecksuchkammer |
-
1983
- 1983-11-27 JP JP18289183U patent/JPS6090649U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6090649U (ja) | 1985-06-21 |
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