JPH0263A - フォトマスクカバー - Google Patents

フォトマスクカバー

Info

Publication number
JPH0263A
JPH0263A JP1089136A JP8913689A JPH0263A JP H0263 A JPH0263 A JP H0263A JP 1089136 A JP1089136 A JP 1089136A JP 8913689 A JP8913689 A JP 8913689A JP H0263 A JPH0263 A JP H0263A
Authority
JP
Japan
Prior art keywords
thin film
photomask
plasticizer
thickness
cellulose
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1089136A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0544017B2 (enExample
Inventor
Etsuo Otake
大竹　悦夫
Kaoru Yamaki
山木　薫
Takayuki Kuroda
隆之 黒田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daicel Corp
Original Assignee
Daicel Chemical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daicel Chemical Industries Ltd filed Critical Daicel Chemical Industries Ltd
Priority to JP1089136A priority Critical patent/JPH0263A/ja
Publication of JPH0263A publication Critical patent/JPH0263A/ja
Publication of JPH0544017B2 publication Critical patent/JPH0544017B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP1089136A 1989-04-07 1989-04-07 フォトマスクカバー Granted JPH0263A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1089136A JPH0263A (ja) 1989-04-07 1989-04-07 フォトマスクカバー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1089136A JPH0263A (ja) 1989-04-07 1989-04-07 フォトマスクカバー

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57103488A Division JPS58219023A (ja) 1982-06-15 1982-06-15 樹脂薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPH0263A true JPH0263A (ja) 1990-01-05
JPH0544017B2 JPH0544017B2 (enExample) 1993-07-05

Family

ID=13962464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1089136A Granted JPH0263A (ja) 1989-04-07 1989-04-07 フォトマスクカバー

Country Status (1)

Country Link
JP (1) JPH0263A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001201845A (ja) * 1999-11-09 2001-07-27 Asahi Kasei Electronics Co Ltd 大型ペリクル

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI288443B (en) 2002-05-17 2007-10-11 Semiconductor Energy Lab SiN film, semiconductor device, and the manufacturing method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5480082A (en) * 1977-12-05 1979-06-26 Ibm Mask for projecting print
JPS5544841A (en) * 1978-09-26 1980-03-29 Mitsubishi Gas Chem Co Inc Method of producing laminated plates
JPS58196501A (ja) * 1981-12-02 1983-11-16 アドバンスド　セミコンダクタ　プロダクツ 光学的薄膜体の製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5480082A (en) * 1977-12-05 1979-06-26 Ibm Mask for projecting print
JPS5544841A (en) * 1978-09-26 1980-03-29 Mitsubishi Gas Chem Co Inc Method of producing laminated plates
JPS58196501A (ja) * 1981-12-02 1983-11-16 アドバンスド　セミコンダクタ　プロダクツ 光学的薄膜体の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001201845A (ja) * 1999-11-09 2001-07-27 Asahi Kasei Electronics Co Ltd 大型ペリクル

Also Published As

Publication number Publication date
JPH0544017B2 (enExample) 1993-07-05

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