JPH0260077B2 - - Google Patents
Info
- Publication number
- JPH0260077B2 JPH0260077B2 JP18348284A JP18348284A JPH0260077B2 JP H0260077 B2 JPH0260077 B2 JP H0260077B2 JP 18348284 A JP18348284 A JP 18348284A JP 18348284 A JP18348284 A JP 18348284A JP H0260077 B2 JPH0260077 B2 JP H0260077B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- algaas
- cladding layer
- protrusion
- gaas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005253 cladding Methods 0.000 claims description 48
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 claims description 30
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 23
- 230000000903 blocking effect Effects 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 18
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 239000007791 liquid phase Substances 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 11
- 238000005530 etching Methods 0.000 claims description 9
- 239000013078 crystal Substances 0.000 description 12
- 230000010355 oscillation Effects 0.000 description 8
- 239000000155 melt Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000002109 crystal growth method Methods 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Led Devices (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Semiconductor Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59183482A JPS6161484A (ja) | 1984-09-01 | 1984-09-01 | 発光素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59183482A JPS6161484A (ja) | 1984-09-01 | 1984-09-01 | 発光素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6161484A JPS6161484A (ja) | 1986-03-29 |
| JPH0260077B2 true JPH0260077B2 (de) | 1990-12-14 |
Family
ID=16136580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59183482A Granted JPS6161484A (ja) | 1984-09-01 | 1984-09-01 | 発光素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6161484A (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6797388B1 (en) * | 1999-03-18 | 2004-09-28 | Ppg Industries Ohio, Inc. | Methods of making low haze coatings and the coatings and coated articles made thereby |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5830186A (ja) * | 1981-08-18 | 1983-02-22 | Toshiba Corp | 光半導体素子及びその製造方法 |
| JPS5861695A (ja) * | 1981-10-09 | 1983-04-12 | Hitachi Ltd | 半導体レ−ザ素子 |
-
1984
- 1984-09-01 JP JP59183482A patent/JPS6161484A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5830186A (ja) * | 1981-08-18 | 1983-02-22 | Toshiba Corp | 光半導体素子及びその製造方法 |
| JPS5861695A (ja) * | 1981-10-09 | 1983-04-12 | Hitachi Ltd | 半導体レ−ザ素子 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6161484A (ja) | 1986-03-29 |
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