JPH0260055B2 - - Google Patents

Info

Publication number
JPH0260055B2
JPH0260055B2 JP10442984A JP10442984A JPH0260055B2 JP H0260055 B2 JPH0260055 B2 JP H0260055B2 JP 10442984 A JP10442984 A JP 10442984A JP 10442984 A JP10442984 A JP 10442984A JP H0260055 B2 JPH0260055 B2 JP H0260055B2
Authority
JP
Japan
Prior art keywords
substrate
sputter etching
wafer
etching
quartz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10442984A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60249329A (ja
Inventor
Nobuyuki Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP10442984A priority Critical patent/JPS60249329A/ja
Publication of JPS60249329A publication Critical patent/JPS60249329A/ja
Publication of JPH0260055B2 publication Critical patent/JPH0260055B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP10442984A 1984-05-25 1984-05-25 スパッタエッチング装置 Granted JPS60249329A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10442984A JPS60249329A (ja) 1984-05-25 1984-05-25 スパッタエッチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10442984A JPS60249329A (ja) 1984-05-25 1984-05-25 スパッタエッチング装置

Publications (2)

Publication Number Publication Date
JPS60249329A JPS60249329A (ja) 1985-12-10
JPH0260055B2 true JPH0260055B2 (OSRAM) 1990-12-14

Family

ID=14380431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10442984A Granted JPS60249329A (ja) 1984-05-25 1984-05-25 スパッタエッチング装置

Country Status (1)

Country Link
JP (1) JPS60249329A (OSRAM)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0737313Y2 (ja) * 1987-06-30 1995-08-23 日本電気株式会社 スパッタリング装置
JP2868767B2 (ja) * 1987-11-04 1999-03-10 富士電機株式会社 半導体ウエハ処理装置
JP2926213B2 (ja) * 1988-02-12 1999-07-28 東京エレクトロン株式会社 基板処理装置
JPH0234789A (ja) * 1988-07-21 1990-02-05 Hitachi Electron Eng Co Ltd 気相反応装置
US6429139B1 (en) * 1999-12-17 2002-08-06 Eaton Corporation Serial wafer handling mechanism

Also Published As

Publication number Publication date
JPS60249329A (ja) 1985-12-10

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Legal Events

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