JPH0257961U - - Google Patents
Info
- Publication number
- JPH0257961U JPH0257961U JP13712888U JP13712888U JPH0257961U JP H0257961 U JPH0257961 U JP H0257961U JP 13712888 U JP13712888 U JP 13712888U JP 13712888 U JP13712888 U JP 13712888U JP H0257961 U JPH0257961 U JP H0257961U
- Authority
- JP
- Japan
- Prior art keywords
- quartz ampoule
- gallium
- quartz
- single crystal
- arsenic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000003708 ampul Substances 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims description 6
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims 3
- 229910052785 arsenic Inorganic materials 0.000 claims 3
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims 3
- 229910052733 gallium Inorganic materials 0.000 claims 3
- 238000001514 detection method Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 239000000155 melt Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13712888U JPH0257961U (enrdf_load_stackoverflow) | 1988-10-20 | 1988-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13712888U JPH0257961U (enrdf_load_stackoverflow) | 1988-10-20 | 1988-10-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0257961U true JPH0257961U (enrdf_load_stackoverflow) | 1990-04-26 |
Family
ID=31398271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13712888U Pending JPH0257961U (enrdf_load_stackoverflow) | 1988-10-20 | 1988-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0257961U (enrdf_load_stackoverflow) |
-
1988
- 1988-10-20 JP JP13712888U patent/JPH0257961U/ja active Pending
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