JPS6279883U - - Google Patents

Info

Publication number
JPS6279883U
JPS6279883U JP17008685U JP17008685U JPS6279883U JP S6279883 U JPS6279883 U JP S6279883U JP 17008685 U JP17008685 U JP 17008685U JP 17008685 U JP17008685 U JP 17008685U JP S6279883 U JPS6279883 U JP S6279883U
Authority
JP
Japan
Prior art keywords
monitoring window
crystal
quartz rod
facing
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17008685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17008685U priority Critical patent/JPS6279883U/ja
Publication of JPS6279883U publication Critical patent/JPS6279883U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP17008685U 1985-11-05 1985-11-05 Pending JPS6279883U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17008685U JPS6279883U (enrdf_load_stackoverflow) 1985-11-05 1985-11-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17008685U JPS6279883U (enrdf_load_stackoverflow) 1985-11-05 1985-11-05

Publications (1)

Publication Number Publication Date
JPS6279883U true JPS6279883U (enrdf_load_stackoverflow) 1987-05-21

Family

ID=31104491

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17008685U Pending JPS6279883U (enrdf_load_stackoverflow) 1985-11-05 1985-11-05

Country Status (1)

Country Link
JP (1) JPS6279883U (enrdf_load_stackoverflow)

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