JPH0194468U - - Google Patents

Info

Publication number
JPH0194468U
JPH0194468U JP19086687U JP19086687U JPH0194468U JP H0194468 U JPH0194468 U JP H0194468U JP 19086687 U JP19086687 U JP 19086687U JP 19086687 U JP19086687 U JP 19086687U JP H0194468 U JPH0194468 U JP H0194468U
Authority
JP
Japan
Prior art keywords
single crystal
crucible
pulling
cooling cylinder
czyochralski
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19086687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0523579Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987190866U priority Critical patent/JPH0523579Y2/ja
Publication of JPH0194468U publication Critical patent/JPH0194468U/ja
Application granted granted Critical
Publication of JPH0523579Y2 publication Critical patent/JPH0523579Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1987190866U 1987-12-16 1987-12-16 Expired - Lifetime JPH0523579Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987190866U JPH0523579Y2 (enrdf_load_stackoverflow) 1987-12-16 1987-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987190866U JPH0523579Y2 (enrdf_load_stackoverflow) 1987-12-16 1987-12-16

Publications (2)

Publication Number Publication Date
JPH0194468U true JPH0194468U (enrdf_load_stackoverflow) 1989-06-21
JPH0523579Y2 JPH0523579Y2 (enrdf_load_stackoverflow) 1993-06-16

Family

ID=31481805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987190866U Expired - Lifetime JPH0523579Y2 (enrdf_load_stackoverflow) 1987-12-16 1987-12-16

Country Status (1)

Country Link
JP (1) JPH0523579Y2 (enrdf_load_stackoverflow)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS546511A (en) * 1977-06-17 1979-01-18 Hitachi Ltd Rotary type magnetic head
JPS5645894A (en) * 1979-09-25 1981-04-25 Nippon Telegr & Teleph Corp <Ntt> Reducing method for defect of silicon single crystal
JPS5740119A (en) * 1980-07-18 1982-03-05 Skf Kugellagerfabriken Gmbh Thin bearing bush made by pressdrawing
JPS5750759A (en) * 1980-09-10 1982-03-25 Hitachi Ltd Charged particle irradiator
JPS62138385A (ja) * 1985-12-11 1987-06-22 Shin Etsu Handotai Co Ltd 半導体単結晶の引上装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS546511A (en) * 1977-06-17 1979-01-18 Hitachi Ltd Rotary type magnetic head
JPS5645894A (en) * 1979-09-25 1981-04-25 Nippon Telegr & Teleph Corp <Ntt> Reducing method for defect of silicon single crystal
JPS5740119A (en) * 1980-07-18 1982-03-05 Skf Kugellagerfabriken Gmbh Thin bearing bush made by pressdrawing
JPS5750759A (en) * 1980-09-10 1982-03-25 Hitachi Ltd Charged particle irradiator
JPS62138385A (ja) * 1985-12-11 1987-06-22 Shin Etsu Handotai Co Ltd 半導体単結晶の引上装置

Also Published As

Publication number Publication date
JPH0523579Y2 (enrdf_load_stackoverflow) 1993-06-16

Similar Documents

Publication Publication Date Title
JPH0194468U (enrdf_load_stackoverflow)
JPS61183971U (enrdf_load_stackoverflow)
JPS6143275U (ja) 結晶成長装置
JPS58121377U (ja) シリコン単結晶引上げ装置用黒鉛部品
JPS63186775U (enrdf_load_stackoverflow)
JPS63199166U (enrdf_load_stackoverflow)
JPH0165866U (enrdf_load_stackoverflow)
JPH02102472U (enrdf_load_stackoverflow)
JPS6330356U (enrdf_load_stackoverflow)
JPS6086566U (ja) 熱反射板付種結晶支持具
JPS6369166U (enrdf_load_stackoverflow)
JPS58113776U (ja) フエライト単結晶の製造装置
JPS61176269U (enrdf_load_stackoverflow)
JPH0229461U (enrdf_load_stackoverflow)
JPS6381867U (enrdf_load_stackoverflow)
JPS6241075U (enrdf_load_stackoverflow)
JPH0456765U (enrdf_load_stackoverflow)
JPH0367075U (enrdf_load_stackoverflow)
JPS6010197U (ja) 単結晶育成用ルツボ
JPS63199169U (enrdf_load_stackoverflow)
JPS62203271U (enrdf_load_stackoverflow)
JPH01149467U (enrdf_load_stackoverflow)
JPS63162871U (enrdf_load_stackoverflow)
JPS6364778U (enrdf_load_stackoverflow)
JPS604573U (ja) 結晶引上げ装置