JPH01122068U - - Google Patents

Info

Publication number
JPH01122068U
JPH01122068U JP1701588U JP1701588U JPH01122068U JP H01122068 U JPH01122068 U JP H01122068U JP 1701588 U JP1701588 U JP 1701588U JP 1701588 U JP1701588 U JP 1701588U JP H01122068 U JPH01122068 U JP H01122068U
Authority
JP
Japan
Prior art keywords
raw material
single crystal
semiconductor single
supply cylinder
supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1701588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1701588U priority Critical patent/JPH01122068U/ja
Publication of JPH01122068U publication Critical patent/JPH01122068U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1701588U 1988-02-13 1988-02-13 Pending JPH01122068U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1701588U JPH01122068U (enrdf_load_stackoverflow) 1988-02-13 1988-02-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1701588U JPH01122068U (enrdf_load_stackoverflow) 1988-02-13 1988-02-13

Publications (1)

Publication Number Publication Date
JPH01122068U true JPH01122068U (enrdf_load_stackoverflow) 1989-08-18

Family

ID=31230441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1701588U Pending JPH01122068U (enrdf_load_stackoverflow) 1988-02-13 1988-02-13

Country Status (1)

Country Link
JP (1) JPH01122068U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04154688A (ja) * 1990-10-17 1992-05-27 Komatsu Electron Metals Co Ltd 半導体単結晶製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04154688A (ja) * 1990-10-17 1992-05-27 Komatsu Electron Metals Co Ltd 半導体単結晶製造装置

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