JPS63186775U - - Google Patents

Info

Publication number
JPS63186775U
JPS63186775U JP7588787U JP7588787U JPS63186775U JP S63186775 U JPS63186775 U JP S63186775U JP 7588787 U JP7588787 U JP 7588787U JP 7588787 U JP7588787 U JP 7588787U JP S63186775 U JPS63186775 U JP S63186775U
Authority
JP
Japan
Prior art keywords
single crystal
liquid phase
substrate
silicon melt
crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7588787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7588787U priority Critical patent/JPS63186775U/ja
Publication of JPS63186775U publication Critical patent/JPS63186775U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP7588787U 1987-05-20 1987-05-20 Pending JPS63186775U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7588787U JPS63186775U (enrdf_load_stackoverflow) 1987-05-20 1987-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7588787U JPS63186775U (enrdf_load_stackoverflow) 1987-05-20 1987-05-20

Publications (1)

Publication Number Publication Date
JPS63186775U true JPS63186775U (enrdf_load_stackoverflow) 1988-11-30

Family

ID=30922448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7588787U Pending JPS63186775U (enrdf_load_stackoverflow) 1987-05-20 1987-05-20

Country Status (1)

Country Link
JP (1) JPS63186775U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011168447A (ja) * 2010-02-18 2011-09-01 Toyota Motor Corp ＳｉＣ単結晶の製造方法
WO2017183747A1 (ko) * 2016-04-21 2017-10-26 한국세라믹기술원 용액성장용 도가니 및 도가니 내의 용액성장 방법

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011168447A (ja) * 2010-02-18 2011-09-01 Toyota Motor Corp ＳｉＣ単結晶の製造方法
CN102762780A (zh) * 2010-02-18 2012-10-31 丰田自动车株式会社 制造碳化硅单晶的方法
WO2017183747A1 (ko) * 2016-04-21 2017-10-26 한국세라믹기술원 용액성장용 도가니 및 도가니 내의 용액성장 방법

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