JPS63186777U - - Google Patents

Info

Publication number
JPS63186777U
JPS63186777U JP7564787U JP7564787U JPS63186777U JP S63186777 U JPS63186777 U JP S63186777U JP 7564787 U JP7564787 U JP 7564787U JP 7564787 U JP7564787 U JP 7564787U JP S63186777 U JPS63186777 U JP S63186777U
Authority
JP
Japan
Prior art keywords
ring
vapor phase
phase growth
shaft
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7564787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0516226Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7564787U priority Critical patent/JPH0516226Y2/ja
Publication of JPS63186777U publication Critical patent/JPS63186777U/ja
Application granted granted Critical
Publication of JPH0516226Y2 publication Critical patent/JPH0516226Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP7564787U 1987-05-20 1987-05-20 Expired - Lifetime JPH0516226Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7564787U JPH0516226Y2 (enrdf_load_stackoverflow) 1987-05-20 1987-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7564787U JPH0516226Y2 (enrdf_load_stackoverflow) 1987-05-20 1987-05-20

Publications (2)

Publication Number Publication Date
JPS63186777U true JPS63186777U (enrdf_load_stackoverflow) 1988-11-30
JPH0516226Y2 JPH0516226Y2 (enrdf_load_stackoverflow) 1993-04-28

Family

ID=30921988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7564787U Expired - Lifetime JPH0516226Y2 (enrdf_load_stackoverflow) 1987-05-20 1987-05-20

Country Status (1)

Country Link
JP (1) JPH0516226Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0516226Y2 (enrdf_load_stackoverflow) 1993-04-28

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