JPH0516226Y2 - - Google Patents
Info
- Publication number
- JPH0516226Y2 JPH0516226Y2 JP7564787U JP7564787U JPH0516226Y2 JP H0516226 Y2 JPH0516226 Y2 JP H0516226Y2 JP 7564787 U JP7564787 U JP 7564787U JP 7564787 U JP7564787 U JP 7564787U JP H0516226 Y2 JPH0516226 Y2 JP H0516226Y2
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- vapor phase
- phase growth
- ring
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 15
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims description 13
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000000428 dust Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7564787U JPH0516226Y2 (enrdf_load_stackoverflow) | 1987-05-20 | 1987-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7564787U JPH0516226Y2 (enrdf_load_stackoverflow) | 1987-05-20 | 1987-05-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63186777U JPS63186777U (enrdf_load_stackoverflow) | 1988-11-30 |
| JPH0516226Y2 true JPH0516226Y2 (enrdf_load_stackoverflow) | 1993-04-28 |
Family
ID=30921988
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7564787U Expired - Lifetime JPH0516226Y2 (enrdf_load_stackoverflow) | 1987-05-20 | 1987-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0516226Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-05-20 JP JP7564787U patent/JPH0516226Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63186777U (enrdf_load_stackoverflow) | 1988-11-30 |
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