JPH0438517Y2 - - Google Patents

Info

Publication number
JPH0438517Y2
JPH0438517Y2 JP1982034401U JP3440182U JPH0438517Y2 JP H0438517 Y2 JPH0438517 Y2 JP H0438517Y2 JP 1982034401 U JP1982034401 U JP 1982034401U JP 3440182 U JP3440182 U JP 3440182U JP H0438517 Y2 JPH0438517 Y2 JP H0438517Y2
Authority
JP
Japan
Prior art keywords
epitaxial
solution
carbon boat
growth
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982034401U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58138330U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3440182U priority Critical patent/JPS58138330U/ja
Publication of JPS58138330U publication Critical patent/JPS58138330U/ja
Application granted granted Critical
Publication of JPH0438517Y2 publication Critical patent/JPH0438517Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP3440182U 1982-03-11 1982-03-11 液相エピタキシヤル成長装置 Granted JPS58138330U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3440182U JPS58138330U (ja) 1982-03-11 1982-03-11 液相エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3440182U JPS58138330U (ja) 1982-03-11 1982-03-11 液相エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPS58138330U JPS58138330U (ja) 1983-09-17
JPH0438517Y2 true JPH0438517Y2 (enrdf_load_stackoverflow) 1992-09-09

Family

ID=30045884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3440182U Granted JPS58138330U (ja) 1982-03-11 1982-03-11 液相エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPS58138330U (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961531U (ja) * 1982-10-19 1984-04-23 三洋電機株式会社 液相エピタキシヤル成長装置
JPH0517878Y2 (enrdf_load_stackoverflow) * 1985-05-13 1993-05-13

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5792598A (en) * 1980-11-26 1982-06-09 Fujitsu Ltd Unit for liquid-phase epitaxial growth

Also Published As

Publication number Publication date
JPS58138330U (ja) 1983-09-17

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