JPS58138330U - 液相エピタキシヤル成長装置 - Google Patents

液相エピタキシヤル成長装置

Info

Publication number
JPS58138330U
JPS58138330U JP3440182U JP3440182U JPS58138330U JP S58138330 U JPS58138330 U JP S58138330U JP 3440182 U JP3440182 U JP 3440182U JP 3440182 U JP3440182 U JP 3440182U JP S58138330 U JPS58138330 U JP S58138330U
Authority
JP
Japan
Prior art keywords
epitaxial growth
liquid phase
phase epitaxial
growth equipment
carbon boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3440182U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0438517Y2 (enrdf_load_stackoverflow
Inventor
村上　智樹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP3440182U priority Critical patent/JPS58138330U/ja
Publication of JPS58138330U publication Critical patent/JPS58138330U/ja
Application granted granted Critical
Publication of JPH0438517Y2 publication Critical patent/JPH0438517Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP3440182U 1982-03-11 1982-03-11 液相エピタキシヤル成長装置 Granted JPS58138330U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3440182U JPS58138330U (ja) 1982-03-11 1982-03-11 液相エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3440182U JPS58138330U (ja) 1982-03-11 1982-03-11 液相エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPS58138330U true JPS58138330U (ja) 1983-09-17
JPH0438517Y2 JPH0438517Y2 (enrdf_load_stackoverflow) 1992-09-09

Family

ID=30045884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3440182U Granted JPS58138330U (ja) 1982-03-11 1982-03-11 液相エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPS58138330U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961531U (ja) * 1982-10-19 1984-04-23 三洋電機株式会社 液相エピタキシヤル成長装置
JPS61186233U (enrdf_load_stackoverflow) * 1985-05-13 1986-11-20

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5792598A (en) * 1980-11-26 1982-06-09 Fujitsu Ltd Unit for liquid-phase epitaxial growth

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5792598A (en) * 1980-11-26 1982-06-09 Fujitsu Ltd Unit for liquid-phase epitaxial growth

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5961531U (ja) * 1982-10-19 1984-04-23 三洋電機株式会社 液相エピタキシヤル成長装置
JPS61186233U (enrdf_load_stackoverflow) * 1985-05-13 1986-11-20

Also Published As

Publication number Publication date
JPH0438517Y2 (enrdf_load_stackoverflow) 1992-09-09

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