JPH0523583Y2 - - Google Patents
Info
- Publication number
- JPH0523583Y2 JPH0523583Y2 JP12702487U JP12702487U JPH0523583Y2 JP H0523583 Y2 JPH0523583 Y2 JP H0523583Y2 JP 12702487 U JP12702487 U JP 12702487U JP 12702487 U JP12702487 U JP 12702487U JP H0523583 Y2 JPH0523583 Y2 JP H0523583Y2
- Authority
- JP
- Japan
- Prior art keywords
- cap
- melt tank
- melt
- quartz tube
- charging hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000155 melt Substances 0.000 claims description 56
- 239000013078 crystal Substances 0.000 claims description 25
- 239000004065 semiconductor Substances 0.000 claims description 14
- 239000007791 liquid phase Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 238000003780 insertion Methods 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims description 4
- 239000010453 quartz Substances 0.000 description 30
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 30
- 238000010438 heat treatment Methods 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004943 liquid phase epitaxy Methods 0.000 description 1
- 239000000289 melt material Substances 0.000 description 1
- 238000010309 melting process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12702487U JPH0523583Y2 (enrdf_load_stackoverflow) | 1987-08-21 | 1987-08-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12702487U JPH0523583Y2 (enrdf_load_stackoverflow) | 1987-08-21 | 1987-08-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6433575U JPS6433575U (enrdf_load_stackoverflow) | 1989-03-01 |
| JPH0523583Y2 true JPH0523583Y2 (enrdf_load_stackoverflow) | 1993-06-16 |
Family
ID=31379072
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12702487U Expired - Lifetime JPH0523583Y2 (enrdf_load_stackoverflow) | 1987-08-21 | 1987-08-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0523583Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-08-21 JP JP12702487U patent/JPH0523583Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6433575U (enrdf_load_stackoverflow) | 1989-03-01 |