JP2001039793A5 - - Google Patents

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Publication number
JP2001039793A5
JP2001039793A5 JP1999214763A JP21476399A JP2001039793A5 JP 2001039793 A5 JP2001039793 A5 JP 2001039793A5 JP 1999214763 A JP1999214763 A JP 1999214763A JP 21476399 A JP21476399 A JP 21476399A JP 2001039793 A5 JP2001039793 A5 JP 2001039793A5
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JP
Japan
Prior art keywords
substrate
opening
growth
crystal growth
phase epitaxial
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Application number
JP1999214763A
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English (en)
Japanese (ja)
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JP2001039793A (ja
JP4870859B2 (ja
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Priority to JP21476399A priority Critical patent/JP4870859B2/ja
Priority claimed from JP21476399A external-priority patent/JP4870859B2/ja
Publication of JP2001039793A publication Critical patent/JP2001039793A/ja
Publication of JP2001039793A5 publication Critical patent/JP2001039793A5/ja
Application granted granted Critical
Publication of JP4870859B2 publication Critical patent/JP4870859B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP21476399A 1999-07-29 1999-07-29 液相エピタキシャル成長装置及び成長方法 Expired - Fee Related JP4870859B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21476399A JP4870859B2 (ja) 1999-07-29 1999-07-29 液相エピタキシャル成長装置及び成長方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21476399A JP4870859B2 (ja) 1999-07-29 1999-07-29 液相エピタキシャル成長装置及び成長方法

Publications (3)

Publication Number Publication Date
JP2001039793A JP2001039793A (ja) 2001-02-13
JP2001039793A5 true JP2001039793A5 (enrdf_load_stackoverflow) 2006-08-24
JP4870859B2 JP4870859B2 (ja) 2012-02-08

Family

ID=16661145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21476399A Expired - Fee Related JP4870859B2 (ja) 1999-07-29 1999-07-29 液相エピタキシャル成長装置及び成長方法

Country Status (1)

Country Link
JP (1) JP4870859B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4618944B2 (ja) * 2001-08-06 2011-01-26 シャープ株式会社 結晶シートの製造装置、および結晶シートの製造方法

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